Air Products and Chemicals, Inc.

Versum Materials US, LLC

James Joseph Hart

Howard P Withers, Jr

Philip Bruce Henderson

Sai-Hong Andrew Lo

Reinaldo Mario Machado

Daniel Joseph Tempel

Rajiv Krishan Agarwal

Joseph T Sluzevich

Diwakar Garg

Ronald Martin Pearlstein

Madhukar Bhaskara Rao

Wayne Thomas McDermott

Robert George Syvret

Pushpinder S Puri

John Peter Hobbs

David Ross Graham

Bernard A Toseland

Jeffrey Richard Brzozowski

Andrew Joseph Woytek

Krishnakumar Jambunathan

Hoshang Subawalla

John B Appleby

James Patrick Nehlsen

Steven Arnold Krouse

Frank Michael Prozonic

Rosaleen Patricia Morris-Oskanian

Edward Jay Cialkowski

Jr Howard Paul Withers

An electrolytic cell which is partitioned into one or more anode chambers and cathode chambers by one or more partition walls between each anode chamber and cathode chamber, wherein each anode chamber comprises one or more anodes comprising an inner surface and an outer surface, and each cathode chamber comprises one or more cathodes, wherein the anode chamber and the cathode chamber are configured such that any one of the one or more cathodes is adjacent to the outer surface of the one or more anodes and there is no cathode adjacent to the inner surface of the one or more anodes; a molten salt electrolyte surrounding the one or more anodes and the one or more cathodes; at least one anode gas outlet for withdrawing gas from the anode chamber; and at least one cathode gas outlet for withdrawing gas from the cathode chamber.

Electrolytic apparatus, system and method for the efficient production of nitrogen trifluoride

The method described herein provides a method for preparing trisilylamine. In one aspect, the method comprises: providing a reaction mixture of trisilylamine and monochlorosilane into a reactor wherein the reaction mixture is at a temperature and pressure sufficient to provide trisilylamine in a liquid phase wherein the reaction mixture is substantially free of an added solvent; contacting the reaction mixture with ammonia to provide a crude mixture comprising trisilylamine and an ammonium chloride solid wherein monochlorosilane is in stoichiometric excess in relation to ammonia; purifiying the crude mixture to provide trisilylamine wherein the trisilyamine is produced at purity level of 90% or greater; and optionally removing the ammonium chloride solid from the reactor.

Process for making trisilylamine

An electrolytic cell and system used for making nitrogen trifluoride consisting of a computer and an electrolytic cell having a body, an electrolyte, at least one anode chamber that produces an anode product gas, at least one cathode chamber, and one or more fluorine adjustment means to maintain fluorine or hydrogen in the anode product gas within a target amount by adjusting the concentration of fluorine in said anode product gas, and the process that controls the system.

Electrolytic apparatus, system and method for the safe production of nitrogen trifluoride

The invention relates to an improvement in apparatus and process for the formation of a complex of Lewis acidic or Lewis basic gases in a reactive liquid of opposite character and for the breaking (fragmentation) of said complex associated with the recovery of the Lewis gas therefrom. The improvement resides in forming finely divided droplets of reactive liquid and controlling the temperature, pressure and concentration of said Lewis gas of opposite character to provide for (a) the formation of said complex between said gas and reactive liquid or (b) the breaking of said complex and the recovery of the atomized droplets of reactive liquid.

Contact methods for formation of Lewis gas/liquid systems and recovery of Lewis gas therefrom

The present invention is directed to improvements in storage and delivery systems that allow for rapid fill and delivery of gases reversibly stored in a nonvolatile liquid medium, improvements in delivery and purity of the delivered gas. The low pressure storage and delivery system for gas which comprises: a container having an interior portion containing a reactive Lewis basic or Lewis acidic reactive liquid medium that is reversibly reacted with a gas having opposing Lewis acidity or basicity;

Storage and delivery systems for gases held in liquid medium

This invention describes an improvement in a process for purifying a nitrogen trifluoride (NF) stream containing unreacted F, HF, and nitrogen oxides from an NFreactor wherein the F, and HF are removed and then the nitrogen oxides removed by adsorption. The improvement in the process resides in selectively removing the Ffrom said NFstream without generating oxygen difluoride, removing HF and then removing said nitrogen oxides by adsorption. Further purification can be effected as desired.

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A process for cleaning a deposit from an interior surface of a processing chamber includes generating a plasma from a cleaning gas including SOFand contacting the interior surface with the plasma for a time sufficient to convert the deposit into a volatile product, thereby cleaning the deposit from the interior surface, in which the process is conducted in the absence of SF. The deposits, which may be removed by the process of the invention, include silicone, silicone oxide, silicone nitride, tungsten, copper and aluminum.

Plasma cleaning gas with lower global warming potential than SF6

An economical means of safely &ldquo;containing&rdquo; or &ldquo;packaging&rdquo; commercial electrophilic fluorination agents whereby these agents are readily stored and transported in a package, typically without loss of &ldquo;F &rdquo; activity, and in a form which is readily and directly useable, i.e., in solution or a slurry. Importantly, the solution/slurry medium provides a tremendous safety margin for storage and transportation since the solution medium has an enormous ability to absorb heat (due to the latent heat of vaporization of the liquid) relative to the contained active fluorination agent.

Package for safe storage of electrophilic fluorinating agent

Growing community of inventors

Fogelsville, PA, United States of America

James Joseph Hart