Novellus Systems Incorporated

James Jed Crawford

John F Stumpf

David T Marquardt

John Derwood Herb

Edmund Minshall

Robert Marshall Stowell

Brian Severson

Timothy Patrick Cleary

Rand Conner

Michael D Smigel

Kevin Bertsch

Antoni F Jakubiec

Franklin D Root

Joe E Koeth

James Ekberg

Jasent Montano

In accordance with one embodiment of the invention, a load cup mechanism is provided for loading and unloading apparatus such as a CMP apparatus. The load cup mechanism, configured to load a work piece into and to unload a work piece from the apparatus, comprises a load cup arm configured to pivot about an axis between a load position aligned with the apparatus and an off-load position. A work piece platform is coupled to an end of the load cup arm and a plurality of lift fingers and a plurality of guide fingers, configured to support and center a work piece, are spaced about the work piece platform. A plurality of guide posts are spaced apart about the periphery of the work piece platform and are configured to align the work piece platform, in the load position, to the processing apparatus.

CMP apparatus and load cup mechanism

Methods and apparatus are provided for the chemical mechanical planarization (CMP) of a surface of a work piece. In accordance with one embodiment of the invention the apparatus comprises a plurality of CMP systems, a plurality of load cups for loading unprocessed work pieces into and unloading processed work pieces from the plurality of CMP systems, a plurality of cleaning stations for cleaning processed work pieces unloaded from the CMP systems, and a single robot configured to transfer unprocessed work pieces to the plurality of load cups and to transfer processed work pieces from the load cups to the plurality of cleaning stations.

CMP apparatus and method

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Chandler, AZ, United States of America

James Jed Crawford