International Business Machines Corporation

Other

James J McGill

Maheswaran Surendra

Marc A Taubenblatt

John Z Colt, Jr

Nancy T Pascoe

Asif Ghias

Raymond James Bunkofske

Gary S Selwyn

C Richard Guarnieri

Gary W Rubolff

Manoj Dalvie

A method and structure for controlling a manufacturing tool includes measuring different manufacturing parameters of the tool, transforming a plurality of time series of the manufacturing parameters into intermediate variables based on restrictions and historical reference statistics, generating a surrogate variable based on the intermediate variables, if the surrogate variable exceeds a predetermined limit, identifying a first intermediate variable, of the intermediate variables, that caused the surrogate variable to exceed the predetermined limit and identifying a first manufacturing parameter associated with the first intermediate variable, and inhibiting further operation of the tool until the first manufacturing parameter has been modified to bring the surrogate value within the predetermined limit.

User configurable multivariate time series reduction tool control method

A device for reducing plasma irregularities includes an electrode assembly capable of applying an electric potential to said plasma. The electrode assembly includes a portion for reducing the plasma irregularities. The portion which reduces the plasma irregularities includes alternately a buried portion which is capable of altering the potential within the buried element, or else a conditioned portion of the surface which controls reflectivity and/or emissivity of portions of a surface of the electrode assembly differently.

Method and apparatus for tuning field for plasma processing using

Growing community of inventors

Fishkill, NY, United States of America

James J McGill