Intel Corporation

Transparent Optical, Inc.

James Higgins Smith

Steven Saeed Nasiri

Dmitry Vasily Bakin

Janusz Bryzek

Cheng-Chung Huang

Alex Harwit

Mitchell Novack

Zbigniew Sufleta

Haesung Kwon

David Lambe Marx

James Starr

A method of controllably attenuating a beam of light coupled into a port includes directing the beam of light against a mirror, and controlling an orientation of the mirror such that a predetermined fraction of the beam of light is coupled into the port. The predetermined fraction is less than a maximum fraction corresponding to optimal coupling of the beam of light into the port. The method may be implemented with a variable optical attenuator including a first port, a second port, a mirror located to direct light output by the first port to the second port, and a controller coupled to the mirror to align it such that the predetermined fraction of light is coupled into the second port. The method may also be implemented with an optical switch.

Variable optical attenuator

The present invention is directed towards apparatuses for rotating a gimbaled platform with rotatable actuators. Gimbal springs comprised of component springs with compliant axes that intersect at a nonzero angle are coupled to the gimbaled platform. Preferably, the compliant axes of the component springs are oriented at an approximately 45 degree angle relative to the actuator rotation axes. Wraparound lever arms coupling the rotatable actuators with the gimbal springs serve to increase the leverage ratio, thereby permitting greater platform rotation for a given actuator rotation.

Gimbaled micromechanical rotation system

Method for manufacturing microelectromechanical mirror and mirror array. Control electrodes and addressing circuitry are etched from a metallic layer deposited onto a reference layer substrate. Standoff-posts are etched from a subsequently deposited polyimide layer. A freely movable plate flexibly suspended from a plurality of electrostatic actuators that are flexibly suspended from a support frame is etched from an actuation layer substrate using a high aspect ratio etch. A mirror support post and surface are etched from a mirror substrate using a high aspect ratio etch. The mirror and actuation layer substrates are fusion bonded together. The reference and actuation layer substrates are bonded together and held apart by the standoff posts. A reflective metallic layer is deposited onto the mirror surface and polished. The mirror is etched from the mirror surface to free the microelectromechanical mirror. Mirror arrays are made by performing the aforementioned steps using standard IC processing techniques.

Microelectromechanical mirror and mirror array

Growing community of inventors

Campbell, CA, United States of America

James Higgins Smith