Entegris, Inc.

Emd Millipore Corporation

Merck Patent Gmbh

James Hamzik

Wilson Moya

Mikhail Kozlov

Jad Ali Jaber

Justin Brewster

Neil P Soice

Saksatha Ly

Yu Zhang

John Charkoudian

Ajish Potty

Jad Jaber

Nripen Singh

Jeffrey E Townley

John Dana Hubbard

William Cataldo

Nicholas J Filipancic

Arezki Boudif

Maybelle Woo

Kevin Galipeau

Testu Kohyama

Siddarth Sampath

Aabid A Mir

Joaquin Umana

Lars Peeck

This disclosure provides certain strong cation-modified ion exchange resins and membranes useful for carrying out the removal of metal and metal ion contaminants in fluid compositions. Filtered liquid compositions with significantly reduced amounts of metals can be used in a microelectronic manufacturing process, such as liquids for removing photoresist. The cation-modified ion exchange resins and membranes of the disclosure can be configured for use in a microelectronic manufacturing system, which can be utilized in the system as a point of use metal-removal feature for liquids entering the system. Advantageously, the filter materials and methods of this disclosure showed considerable improvement in preventing degradation and the formation of color bodies and dimeric and oligomeric materials from ketones (e.g., cyclohexanone) in the liquid compositions while not compromising the filter material's ability to remove undesired metal ions.

Membranes for acid-sensitive solvents

Described are ion-exchange membranes that include a porous polymeric membrane and imidazole ion-exchange groups at surfaces of the membrane; ion-exchange membranes and filters that contain the ion-exchange membranes; and methods of using the ion-exchange membranes and filters for separating charged biological molecule from a liquid.

Ion-exchange membranes, filters, and methods

The disclosure is directed to removal of metal contaminants from fluids, as well as ligand-modified filter materials useful for carrying out such methods. The filters and methods of this disclosure are particularly effective for removal of metals from liquid compositions comprising amines. Such liquid compositions with significantly reduced amounts of metals can be used in a microelectronic manufacturing process, such as liquids for removing photoresist or liquids used in etching. The ligand-modified filters, such as ligand-modified porous membranes, can be configured for use in a microelectronic manufacturing system, which can be utilized in the system as a point of use metal-removal feature for liquids entering the system.

Membranes for removing metallic species from amines

Described are filtration membranes that include a porous fluoropolymer membrane and thermally stable ionic groups; filters and filter components that include these filtration membranes; methods of making the filtration membranes, filters, and filter components; and method of using a filtration membrane, filter component, or filter to remove unwanted material from fluid.

Fluorinated filter membrane, filters, and methods

Described are filter materials having polycarboxyl ligands, such as iminodiacetic acid, which are highly effective for filtering metals or metal ions from fluids. The filter materials can be particularly useful to filter various fluid compositions, such as those used for wet etching, removing photoresist, and cleaning steps in microelectronic device manufacturing.

Ligand-modified filter and methods for reducing metals from liquid compositions

The present disclosure provides a porous polymeric membrane that is coated with a cross-linked polymerized monomer. The coating on the porous polymeric membrane has a charge when it is immersed in an organic liquid. The coated porous polymeric membrane, a filter utilizing the membrane, and a method for treating an organic liquid used for photoresist with the coated porous polymeric membrane to remove metal contaminants from the organic liquid are disclosed.

Coated porous polymeric membranes

Described are filter materials including a polyol ligand, such as n-methylglucamine, and/or a polyphosphonic acid ligand, which are highly effective for filtering metals or metal ions from fluids. The filter materials can be particularly useful to filter basic and acidic fluid compositions, such as those used for wet etching, removing photoresist, and cleaning steps in microelectronic device manufacturing.

The present invention provides novel and improved stimulus responsive polymers and methods of using the same for the purification of biomolecules.

Stimulus responsive polymers for the purification of biomolecules

The present invention relates, at least in part, to improved methods of protein purification. In particular, the present invention relates, at least in part, to methods for purifying an Fc region containing protein from a composition comprising the Fc region containing protein and one or more impurities, where the methods eliminate the need for a holding tank and/or a buffer exchange step.

Growing community of inventors

Billerica, MA, United States of America

James Hamzik