The University of Arizona

Samsung Electronics Co., Ltd.

Rayleigh Optical Corporation

James H Burge

Roger P Angel

Tae-hee Kim

Robert E Parks

Dae Wook Kim

Brian Cuerden

Scott T DeRigne

David S Anderson

Robert A Smythe

Peng Su

In a non-conventional lap tool, i.e., not a stiff tool nor a conformable tool, and related method for grinding/polishing a substrate surface, includes a rigid base plate and attached work surface to define a cavity containing a non-Newtonian fluid. The non-Newtonian fluid behaves as a solid when the work surface is subjected to high shear stress, i.e., rapid tool stroke, yet behaves like a liquid when the tool is moved around the substrate surface when the shear stress of the work surface is low. A diaphragm can be used to further define the cavity and to seal within the non-Newtonian fluid therein.

Non-newtonian lap

A non-contact metrology system utilizes a display that can be programmed with a plurality of targets. The display targets shine on a specular surface and the reflected targets are detected by an imaging device. Based on the display pattern and the expected location of the reflected pattern, it is possible to characterize the reflective surface. The displayed pattern can be a regular array of targets and the reflected pattern detected by the imaging device is an irregular display of targets whose locations are based on the particular display pattern, the location of the display system and imaging device and the nature of the surface. Deviations of the actual location of targets from the expected location of targets is indicative of unexpected variations in the surface. Alternatively, the display has an irregular pattern of targets such that the reflected signals result in a regularly spaced array detected by the imaging device.

System and method for non-contact metrology of surfaces

An aspheric surface measuring apparatus includes an interferometer which generates incident light; a test piece having an aspheric surface from which the incident light is reflected as test light; a first optical element disposed on an optical path of the incident light, having at least one surface with a hologram for diffracting the incident light toward the test piece; and a second optical element disposed after the first optical element, which transmits the incident light toward the aspheric surface and has a concave surface to reduce an incident angle of the test light entering the hologram after having been reflected from the aspheric surface. Alternatively, a single optical element with a hologram and a concave surface can be used instead of the separate first and second optical elements. An extremely aspheric lens can be precisely measured using the apparatus.

Apparatus for and method of measurement of aspheric surfaces using hologram and concave surface

An impact micro-positioning actuator. In one aspect of the invention, a threaded shaft is threadably received in a nut and the nut is impacted by an impacting device, causing the nut first to rotate relative to the shaft by slipping as a result of shaft inertia and subsequently to stick to the shaft as a result of the frictional force therebetween. The nut is returned to its initial position by a return force provided by a return mechanism after impact. The micro-positioning actuator is further improved by controlling at least one and preferably all of the following: the friction, the impact provided by the impacting device, the return force provided by the return mechanism, and the inertia of the shaft. In another aspect of the invention, a threaded shaft is threadably received in a nut and the shaft is impacted by an impacting device, causing the shaft to rotate relative to the nut.

Impact micro-positioning actuator

An interferometer including a test plate member having a computer-generated hologram (CGH) written on the reference surface. In a preferred testing configuration, the interferometer setup includes a laser light source, diverger lens, beamsplitters, collimators, and other auxiliary optics arranged in a common-path (Fizeau-type) configuration to minimize measurement errors for testing an optical test piece with the test plate member having the computer-generated hologram. By having the computer-generated hologram written directly on the reference surface of the test plate member, the measurement of aspheric optical surfaces is made with greater precision, more efficient, and with less cost than prior art interferometers and associated methods.

Growing community of inventors

Tucson, AZ, United States of America

James H Burge