International Business Machines Corporation

United Kingdom Atomic Energy Authority

James F Ziegler

James L Speidell

Robert J Von Gutfeld

Kevin K Chan

Timothy Joseph Dalton

Christopher Vincent Jahnes

Leathen Shi

Leena Paivikki Buchwalter

Jennifer L Lund

Christopher Jhanes

Kevin Shawn Petrarca

Jerome J Cuomo

Jerry M Woodall

Lia Krusin-Elbaum

Robert Otto Schwenker

James A Cairns

John C Murphy

Richard C Joy

Alwin E Michel

James H Anderson

Peter Burr

Scott J McAllister

James Russell Thompson, Jr

Paul William Lisowski

Alan David Marwick

Matthias D Ziegler

Kevin Shawn Petraraca

James A Cainns

Allen Lurio

A microelectromechanical system (MEMS) resonator or filter including a first conductive layer, one or more electrodes patterned in the first conductive layer which serve the function of signal input, signal output, or DC biasing, or some combination of these functions, an evacuated cavity, a resonating member comprised of a lower conductive layer and an upper structural layer, a first air gap between the resonating member and one or more of the electrodes, an upper membrane covering the cavity, and a second air gap between the resonating member and the upper membrane.

Low temperature Bi-CMOS compatible process for MEMS RF resonators and filters

A method of formation of a microelectromechanical system (MEMS) resonator or filter which is compatible with integration with any analog, digital, or mixed-signal integrated circuit (IC) process, after or concurrently with the formation of the metal interconnect layers in those processes, by virtue of its materials of composition, processing steps, and temperature of fabrication is presented. The MEMS resonator or filter incorporates a lower metal level, which forms the electrodes of the MEMS resonator or filter, that may be shared with any or none of the existing metal interconnect levels on the IC. It further incorporates a resonating member that is comprised of at least one metal layer for electrical connection and electrostatic actuation, and at least one dielectric layer for structural purposes. The gap between the electrodes and the resonating member is created by the deposition and subsequent removal of a sacrificial layer comprised of a carbon-based material. The method of removal of the sacrificial material is by an oxygen plasma or an anneal in an oxygen containing ambient. A method of vacuum encapsulation of the MEMS resonator or filter is provided through means of a cavity containing the MEMS device, filled with additional sacrificial material, and sealed. Access vias are created through the membrane sealing the cavity; the sacrificial material is removed as stated previously, and the vias are re-sealed in a vacuum coating process.

Integrated circuit fabrication technique for constructing novel MEMS devices, specifically band-pass filter resonators, in a manner compatible with current integrated circuit processing, and completely encapsulated to optimize performance and eliminate environmental corrosion. The final devices may be constructed of single-crystal silicon, eliminating the mechanical problems associated with using polycrystalline or amorphous materials. However, other materials may be used for the resonator. The final MEMS device lies below the substrate surface, enabling further processing of the integrated circuit, without protruding structures. The MEMS device is about the size of a SRAM cell, and may be easily incorporated into existing integrated circuit chips. The natural frequency of the device may be altered with post-processing or electronically controlled using voltages and currents compatible with integrated circuits.

Method for constructing an encapsulated MEMS band-pass filter for integrated circuits

Communication signal mixing and filtering systems and methods utilizing an encapsulated micro electro-mechanical system (MEMS) device. Furthermore, disclosed is a method of fabricating a simple, unitarily constructed micro electromechanical system (MEMS) device which combines the steps of signal mixing and filtering, and which is smaller, less expensive and more reliable in construction and operation than existing devices currently employed in the technology.

Encapsulated MEMS band-pass filter for integrated circuits and method of fabrication thereof

This invention describes fabrication procedures to construct MEMS devices, specifically band-pass filter resonators, in a manner compatible with current integrated circuit processing. The final devices are constructed of single-crystal silicon, eliminating the mechanical problems associated with using polycrystalline silicon or amorphous silicon. The final MEMS device lies below the silicon surface, allowing further processing of the integrated circuit, without any protruding structures. The MEMS device is about the size of a SRAM cell, and may be easily incorporated into existing integrated circuit chips. The natural frequency of the device may be altered with post-processing or electronically controlled using voltages and currents compatible with integrated circuits.

Process for fabricating single crystal resonant devices that are compatible with integrated circuit processing

A structure (and method) for tuning a resonant structure, includes a resonant structure including either a predetermined material coating provided on either a bar or a cantilever, or a lightly doped single crystal semiconductor material, and a circuit for providing a variable field adjacent the resonant structure, with the length or at least one of the elastic constants of the resonant structure changing with the application of the variable magnetic or electric field, respectively, thereby to selectively tune the resonant structure.

Filter circuit including system for tuning resonant structures to change resonant frequencies thereof

The invention describes methods for locating a treatment device disposed within a living body by means of magnetic fields that are produced by Barkhausen jumps, principally from amorphous tag wires with high permeability that exhibit reentrant flux reversal. When wires of this type are attached to concealed treatment devices such as catheters, interrogation or scanning of the tag wire by a low frequency ac magnetic field affords an accurate means for locating the treatment devices using a sensor coil to detect the magnetic field signal from the wire locating tag. The strength of the field detected by the position of a sensor coil with respect to the locator tag is used to determine the location of the tag. A favorable signal to noise detection ration is obtained as the signal emitted by the wire is at a very high frequency compared to that of the frequency of the interrogation field.

System of providing medical treatment

Encapsulated MEMS band-pass filter for integrated circuits

Communication signal mixing and filtering systems and methods utilizing an encapsulated micro electro-mechanical system (MEMS) device. Furthermore, disclosed is a method of fabricating a simple, unitarily constructed micro electro-mechanical system (MEMS) device which combines the steps of signal mixing and filtering, and which is smaller, less expensive and more reliable in construction and operation than existing devices currently employed in the technology.

Encapsulated MEMS brand-pass filter for integrated circuits

The invention allows more accurate localization of radiation volumes during radiation treatment of tumors. The equipment includes radiation detector elements placed behind the patient during radiation, for treatment of a tumor condition. Such a detector may be constructed of semiconductor or a scintillating material. The radiation treatment plan for the patient includes an additional calculation of the treatment beam energy required for to enable the treatment beam to transit the patient. The energy required for patient transit is then measured, using a treatment beam with a beam current below that which will induce significant tissue damage. The experimental transit flux is then compared to the calculated transit flux, and the difference is used to correct the beam transport parameters in the original radiation treatment plan. Hence lower radiation doses and smaller radiation volumes can be achieved, reducing deleterious radiation side effects.

Method and apparatus for facilitating radiation treatment of deep tumors

The invention provides a system for therapeutic treatment of an organ, tumor, or other internal structure of a living body with therapeutic radiation after implantation, at the organ, of a magnetic element to identify the location of the organ, the element being capable of emitting a magnetic signal in response to an applied magnetic field. The system comprises a magnetic field generator for irradiating the magnetic element with an applied magnetic field, a movable magnetic field sensor for detecting the magnetic signal from a plurality of selected mutually displaced positions to produce a corresponding plurality of element-locating signals, a computing apparatus for converting the signals to a location image of the internal structure, and a controlled source of therapeutic radiation for focussing a selected degree and duration of therapeutic radiation at a target determined from the location image of the magnetic element. Preferably, the magnetic element is a length of wire of an amorphous magnetic material which produces a magnetic signal that exhibits non-linear Bark&plus;hausen jumps in response to an applied ac magnetic field.

Imaging of internal structures of living bodies by sensing implanted magnetic devices

This invention helps achieve accurate focussing of therapeutic radiation at an internal structure (e.g. cancerous organ), which is often substantially movable within a living body. For this purpose, suitable sensors are laproscopically or surgically implanted at the location of the organ. These sensors may include semiconductor materials, scintillation materials, piezo-acoustic materials, x-ray emitters, or other materials which emit a signal when they are scanned by a beam of harmless investigative radiation, such as low intensity therapeutic radiation. The emitted signal is then monitored via implanted wires or light fibers or via external detectors during scanning to determine the targetted location at which a signal maximum occurs, whereupon the desired intensity of therapeutic radiation is focussed on this targetted location.

Focussing of therapeutic radiation on internal structures of living bodies

There is disclosed herein an invention for increasing the current carrying capability of high-Tc superconductor materials. The inventive method includes irradiating such superconductors with light particles, such as neutrons, protons and thermal neutrons, having energy sufficient to cause fission of one or more elements in the superconductor material at a dose rate and for a time sufficient to create highly splayed (dispersed in orientation) extended columns of damaged material therein. These splayed tracks significantly enhance the pinning of magnetic vortices thereby effectively reducing the vortex creep at high temperatures resulting in increased current carrying capability.

Enhancement of persistent currents in high TC superconductors

Coated ceramic substrates or structures having a barrier layer against alpha-particle radiation and integrated circuits prepared therefrom. Ceramic surfaces having reduced or modified surface roughness are also provided.

Growing community of inventors

Yorktown Heights, NY, United States of America

James F Ziegler