Tokyo Electron Limited

Motorola Corporation

James Edmund Klekotka

James E Willis

Thomas Peter Emmons, Jr

Richard Scott Torkington

Satoshi Harada

Edward C Hume, Iii

David L Dilley

The present invention provides methods and system for improving the accuracy of measurements made using optical metrology. The present invention relates to methods and systems for changing the optical properties of tunable resists that can be used in the production of electronic devices such as integrated circuits. Further, the invention provides methods and systems for using a modifiable resist layer that provides a first set of optical properties before exposure and a second set of optical properties after exposure.

Methods and apparatus for using an optically tunable soft mask to create a profile library

A method of using an APC system to perform a data pre-population function is described in which the APC system is coupled to a processing element. The APC system comprises an APC computer including operational software, a database coupled to the APC computer, and a GUI, and the processing element comprises at least one of a tool, a processing module, and a sensor. When the APC system operates, the APC system collects data from the processing element and stores the collected data in the database. When an APC malfunction occurs, a data recovery (data pre-population) can be performed. When some of the historical data is missing, a data recovery (data pre-population) can be performed. When an APC system is coupled to a new tool having some historical data, a data recovery (data pre-population) can be performed.

Method for data pre-population

Creating an optically tunable anti-reflective coating

The present invention presents an improved apparatus and method for monitoring parts in a material processing system, wherein the material processing system includes a processing tool, a number of RF-responsive part identifiers coupled to the processing tool to generate and transmit part ID data, and a sensor interface assembly (SIA) configured to receive the part ID data from the plurality of RF-responsive part identifiers.

Method and apparatus for monitoring parts in a material processing system

The present invention presents an apparatus and method for monitoring a material processing system, wherein the material processing system includes a processing tool, a number of RF-responsive process sensors coupled to the processing tool to generate and transmit process data, and a sensor interface assembly (SIA) configured to receive the process data from the plurality of RF-responsive process sensors.

Method and apparatus for monitoring a material processing system

Due to the large up front cost in fielding a full capacity satellite constellation ( ), it is desirable to have the ability to modify the constellation after deployment to add more capacity in a fashion that does not interrupt service, in order to satisfy a variable or growing market demand. In a satellite constellation including a plurality of orbital planes, each of the orbital planes precesses at a known rate. This invention employs deliberate dynamic manipulation of the orbital precession rates for different satellite planes to increase the separation distance between two adjacent planes. A new plane is then inserted between the two adjacent planes to increase the number of planes and increase the capacity. By continuing a gradual variation, a new orbital plane can be added periodically, e.g. once a year, and the variation can be stopped when no additional orbital planes are desired.

Technique for satellite constellation growth

A phase locked loop including a programmable frequency divider with a variable modulus divider (VMD) having two modes of operation, n and n+1, a programmable counter for counting the number of times the VMD divides the input signal and a comparator for comparing the count in the counter to a predetermined number and switching the VMD from the first mode to the second mode when the instant count and predetermined number are equal. The programmable counter provides an output pulse each time the total count equals a selected number. The VMD is a GaAs semiconductor device.

Growing community of inventors

Mesa, AZ, United States of America

James Edmund Klekotka