Tokyo Electron Limited

Other

James E Willis

James Edmund Klekotka

Satoshi Harada

Edward C Hume, Iii

Merritt Funk

Radha Sundararajan

Hongyu Henry Yue

Asao Yamashita

Masayuki Tomoyasu

Kevin Lally

Hieu A Lam

Kevin Augustine Pinto

Kevin Andrew Chamness

Raymond Peterson

David Fatke

Manuel Perez

The present invention provides methods and system for improving the accuracy of measurements made using optical metrology. The present invention relates to methods and systems for changing the optical properties of tunable resists that can be used in the production of electronic devices such as integrated circuits. Further, the invention provides methods and systems for using a modifiable resist layer that provides a first set of optical properties before exposure and a second set of optical properties after exposure.

Methods and apparatus for changing the optical properties of resists

Methods and apparatus for using an optically tunable soft mask to create a profile library

A method for implementing FDC in an APC system including receiving an FDC model from memory; providing the FDC model to a process model calculation engine; computing a vector of predicted dependent process parameters using the process model calculation engine; receiving a process recipe comprising a set of recipe parameters, providing the process recipe to a process module; executing the process recipe to produce a vector of measured dependent process parameters; calculating a difference between the vector of predicted dependent process parameters and the vector of measured dependent process parameters; comparing the difference to a threshold value; and declaring a fault condition when the difference is greater than the threshold value.

Fault detection and classification (FDC) using a run-to-run controller

A method of using an APC system to perform a data pre-population function is described in which the APC system is coupled to a processing element. The APC system comprises an APC computer including operational software, a database coupled to the APC computer, and a GUI, and the processing element comprises at least one of a tool, a processing module, and a sensor. When the APC system operates, the APC system collects data from the processing element and stores the collected data in the database. When an APC malfunction occurs, a data recovery (data pre-population) can be performed. When some of the historical data is missing, a data recovery (data pre-population) can be performed. When an APC system is coupled to a new tool having some historical data, a data recovery (data pre-population) can be performed.

Method for data pre-population

Creating an optically tunable anti-reflective coating

A method of automatically configuring an Advanced Process Control (APC) system for a semiconductor manufacturing environment in which an auto-configuration script is generated for executing an auto-configuration program. The auto-configuration script activates default values for input to the auto-configuration program. The auto-configuration script is executed to generate an enabled parameter file output from the auto-configuration program. The enabled parameter file identifies parameters for statistical process control (SPC) chart generation.

Method for automatic configuration of processing system

A method and apparatus for an exercising device. The exercising device includes an elongated flexible body having a first extremity and a second extremity disposed to either side of a central portion and an elongated elastic member. The elongated elastic member includes a first end and a second end. The first and second ends are (i) adapted to accommodate a human limb and (ii) adapted to removably couple to the central portion of the elongated flexible body. A plurality of ring structures are disposed along an axis extending between the first extremity and the second extremity of the elongated flexible body, a first clip is disposed at the first end of the elongated elastic member and a second clip is disposed at the second end of the elongated elastic member. The first and second clips are adapted to couple the first and the second ends of the elongated elastic member to ones of the plurality of ring structures. The plurality of ring structures desirably includes a piece of cloth material sewn to the body so as to permanently capture flat portions of D-rings and attach the D-rings along the axis and to the elongated flexible body.

Exercise system

A unique method for constructing a bag for use as a pillow and a receptacle having a first side of a moisture-proof material and an opposite second side having a moisture-proof panel and a soft panel. In one configuration whth the first side as the outer side, the bag serves as a receptacle for camping items such as a sleeping bag. In the reverse position with the second side as the outer side, the bag may be filled with soft clothing items and used as a pillow with the moisture-resistant panel of the second side engaging the ground and the softer panel adapted to receive the head of the user.

Method for constructing a reversible duffle bag

Growing community of inventors

Buellton, CA, United States of America

James E Willis