Other

Consortium for Surface Processing, Inc.

James E Stevens

Joseph L Cecchi

Patrick L Colestock

Randel C Martin

M Joyce Stevens

A frictionally variant seat pad comprising a top member, a bottom member, a polyester filling and a plurality of hook and loop receiving strips. The polyester filling is disposed between the top and bottom member, and the top and bottom member are secured in fixed relation to one another by means of stitching located along the perimeter of both the top and bottom members. The surface of the top member is constructed of satin, which provides a low co-efficient of friction, allowing an individual to easily slide upon the surface. The bottom member is provided with a non-slip, rubberized backing, which, due to the low co-efficient of friction afforded by the non-slip rubberized backing, grips to the surface upon which the frictionally variant seat pad rests, thereby preventing movement of the frictionally variant seat pad.

Frictionally variant seat pad

A plasma processing apparatus and method using a predetermined proportion of relative power between a TE.sub.11 mode and a TM.sub.01 mode to produce radial uniformity of the plasma. A microwave coupler transforms microwave energy from a microwave source into approximately equal proportions of TE.sub.11 and TM.sub.01 modes. In one embodiment, the coupler includes a first arm for generating the TE.sub.11 mode and a second arm for generating the TM.sub.01 mode which are then combined in a cylindrical waveguide section having a sufficient inner diameter to support propagation of both modes. Other circuit components are provided to prevent cross-coupling of the TE.sub.11 mode into the TM.sub.01 generating arm, and vice versa. Thus, the relative proportion of power of each mode may be independently controlled. A magnetic field generator may be used in the apparatus to create an electron cyclotron resonance condition within the plasma.

Apparatus and method for uniform microwave plasma processing using TE.sub.1

A microwave source is coupled to an electron cyclotron resonance (ECR) system by circularly polarizing the microwave energy from the source in an angular direction with cooperates with the ECR system's magnetic field to produce electron cyclotron resonance, and coupling the circularly polarized microwave energy to the plasma using a quarter wave vacuum window transformer having a dielectric constant which matches the impedance of the circularly polarized microwave energy to the impedance of the plasma. The impedance matching transformer is preferably a vacuum window of the ECR chamber having quarter wave thickness and the appropriate dielectric constant. For high density plasmas in a standard ECR system of 6 cm radius an alumina window 0.98 cm thick procides optimum coupling. The reflected power from the plasma is thereby minimized to provide a dense plasma for the ECR tool while reducing or eliminating the need for manual external tuners for the microwave source.

Method and apparatus for coupling a microwave source in an electron

A suspendible receptacle for generally flat articles comprises wire rod formed into a configuration approximating that of a diamond-shaped parallelogram, provided with hanger means at its upper apex and bent double generally on its horizontal axis to bring its lower apex into proximity with its upper apex to provide between its facing upper and lower portions a pocket to receive generally flat articles.

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Princeton, NJ, United States of America

James E Stevens