Applied Materials, Inc.

James E Brown

Kyle Moran Hanson

Gregory J Wilson

Eric J Bergman

Jason A Rye

Tricia A Youngbull

Timothy G Stolt

Joseph Antony Jonathan

Systems for cleaning electroplating system components may include a seal cleaning assembly incorporated with an electroplating system. The seal cleaning assembly may include an arm pivotable between a first position and a second position. The arm may be rotatable about a central axis of the arm. The seal cleaning assembly may include a cleaning head coupled with a distal portion of the arm. The cleaning head may include a bracket having a faceplate coupled with the arm, and a housing extending from the faceplate. The housing may define one or more arcuate channels extending through the housing to a front surface of the bracket. The cleaning head may also include a rotatable cartridge extending from the housing of the bracket. The cartridge may include a mount cylinder defining one or more apertures configured to deliver a cleaning solution to a pad coupled about the mount cylinder.

Cleaning components and methods in a plating system

Growing community of inventors

Kalispell, MT, United States of America

James E Brown