Hzo, Inc.

Applied Materials, Inc.

James Douglas Dempster

Jason Maynard

Jennifer Y Sun

Senh Thach

Li Xu

Thanh Ngoc Pham

Semyon L Kats

Allen Fox

Methods for obtaining a profile for a batch, or lot, of a precursor material and using the profile while processing the precursor material to form a polymer are disclosed. In such a method, a process profile that corresponds to the characteristics of a particular precursor material (e.g., the batch, etc.) may be generated. That process profile may then be used to cause a material processing system to process the precursor material in a manner that accounts for differences between that precursor material and a 'standard' precursor material, while providing a polymer and, optionally, a film of 'standard' quality. Apparatuses and systems that are configured to obtain profile data for a batch of precursor material, generate or modify a process profile based on the profile data and use the process profile to form a polymer are also disclosed.

Methods for packaging a precursor material

Methods and systems may be provided that detect moisture with an antenna. Electrical impedance at the antenna may be detected by an impedance sensor. Moisture may be detected based on the impedance at the antenna.

Detecting moisture with an antenna

Configuration of detection of physical conditions in and/or around a communication apparatus is described. Further, configuration of an action responsive to the detection of physical conditions, or changes in physical conditions, is described. The communication apparatus may output a user notification in response to a moisture detection notification. A user interface of the communication apparatus may receive a user response. Further actions may be then taken based on the user response to the user notification. Alternatively or in addition, an end-user may predetermine a set of actions to be performed in response to the moisture event. Further, a respective set of actions may be specified for several possible severity levels or thresholds values of the moisture detection.

Moisture detection response

Corrugated elements for defining longitudinal channels in a boat for a deposition apparatus

Boat for a deposition apparatus

Hexcell channel arrangement for use in a boat for a deposition apparatus

Profiles for precursors to polymeric materials

Boat for use in a material deposition apparatus

An electrostatic chuck has an electrode embedded in a dielectric which is mounted on a pedestal. The dielectric has a contact surface with an average surface roughness of less than about 0.5 &#x3bc;m, a surface peak waviness of less than about 0.12 &#x3bc;m, and a surface peak waviness material ratio of greater than about 20%. The surface texture can be formed by lapping the dielectric surface with a slurry of abrasive particles.

Electrostatic chuck having textured contact surface

Disclosed herein is a gas distribution plate for use in a gas distribution assembly for a processing chamber, where the gas distribution plate is fabricated from a solid yttrium oxide-comprising substrate, which may also include aluminum oxide. The gas distribution plate includes a plurality of through-holes, which are typically crescent-shaped. Through-holes which have been formed in the solid yttrium oxide-comprising substrate by ultrasonic drilling perform particularly well. The solid yttrium oxide-comprising substrate typically comprises at least 99.9% yttrium oxide, and has a density of at least 4.92 g/cm, a water absorbency of about 0.02% or less, and an average grain size within the range of about 10 &#x3bc;m to about 25 &#x3bc;m. Also disclosed herein are methods for fabricating and cleaning the yttrium oxide-comprising gas distribution plate.

Gas distribution plate fabricated from a solid yttrium oxide-comprising substrate

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Reno, NV, United States of America

James Douglas Dempster