At&t Bell Laboratories

James D Chlipala

William J Nagy

James N Billig

Kuo H Lee

An integrated circuit includes a conductive fusible link (14) that may be blown by laser energy. The dielectric material (15) covering the fuse is etched away to expose the fuse. A protective dielectric layer (30) is formed on the fuse to a controlled thickness less than that of the interlevel dielectric. The resulting structure prevents shorts between conductors that might otherwise occur due to debris from the fuse-blowing operation, and provides protection to the integrated circuit. In addition, the fuse blowing operation is more consistent from fuse to fuse.

Integrated circuits having improved fusible links

A single beam of radiation is split and part of the beam is directed to conductive links, e.g. runners on a substrate. Analysis of the incident beam and the beam reflected from the substrate permits a determination of when the link is blown and rendered non-conductive and when significant substrate involvement occurs.

Growing community of inventors

Lower Macungie Township, PA, United States of America

James D Chlipala