Control Systems, Inc.

James Charles Elliott

Dirk Alan Frew

Christopher Velton Barr

Thomas Aloysius Barr

A mounting system, for supporting semiconductor process gas delivery and control components for assembly and use as a gas stick, aligns the connection union seals between fittings on adjacent components to absorb accumulated stresses resulting from manufacturing tolerances and reduce the likelihood of seal leakage. Components are mounted on individual upper clamp members which are secured to lower clamp members to form a slidable but non-rotatable radially aligned yoke around a rigid elongate support member for subsequent longitudinal positioning and joining of adjacent fittings.

Method and apparatus for aligning and supporting semiconductor process

A locking device for preventing relative rotation of pretorqued compression nuts used in face seal mechanical fittings includes an inner member having a cavity sized to slide onto and non-rotatably enclose the male or first nut of the fitting, an outer member having a first cavity sized to rotatably receive the inner member and a second cavity sized to slide onto and non-rotatably enclose the female or second nut of the fitting, and at least one set screw projecting inwardly through a threaded borehole in the outer member to non-rotatably engage and lock the inner member.

Growing community of inventors

Albuquerque, NM, United States of America

James Charles Elliott