At&t Bell Laboratories

Bell Telephone Laboratories

James C Phillips

King Lien Tai

Gary D Boyd

Ross A Lemons

Cheng-Hsuan Chen

Joseph P Remeika

Edward G Spencer

Edith C Ong

A method for enhancing linewidth control during the patterning of a substrate with a resist is disclosed. Resists used in the invention have chemically separated structures characterized by two types of regions of different chemical composition, which different types of regions are interspersed among each other. Because the resists used in the present invention have chemically separated structures, anisotropic wet development of these resists is achievable with an appropriate bicomponent wet developer. Consequently, after exposure, the image formed in a thin, upper layer of the resist is transferred with vertical walls through the thickness of the resist.

Anisotropic wet etching of chalcogenide glass resists

Disclosed is an electro-optical device in which color changes are electrically induced in an electrochromic material which is a single or polycrystalline niobium tungstate represented approximately by the formula W.sub.9 Nb.sub.8 O.sub.47. The device comprises an ion source and a source of an electrical field which may be reversible so as to produce coloring and bleaching of the electrochromic material. Due to high corrosion resistance of such material, the ion source may conveniently be a hydrous electrolyte.

Tungsten niobate electrochromic device

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Summit, NJ, United States of America

James C Phillips