Brooks Automation Gmbh

Canon Kabushiki Kaisha

Aeronca Electronics, Inc.

James C Davis, Jr

Christopher A Hofmeister

Richard S Muka

Richard H Eastman

Todd E Bottomley

Norman B Brooks

E Brian Hardegen

A substrate processing apparatus having a supply of substrates, a substrate transport module, and a substrate processing module. The transport module has a movable arm assembly and two substrate holders mounted to the movable arm assembly. The substrate holders each have two separate holding areas for simultaneously holding two substrates. The movable arm assembly has two pairs of driven arms. Each pair of driven arms is connected to a separate one of the holders for extending and retracting the holders along a radial path relative to a center of the movable arm assembly.

Substrate transport apparatus with double substrate holders

A substrate transport apparatus having a movable arm assembly, two substrate holders and a coaxial drive shaft assembly. The movable arm assembly has a general X-shaped section that has its center connected to the coaxial drive shaft assembly. The substrate holders are connected to different pairs of arm sections of the X-shaped section. The coaxial drive shaft assembly moves the arms of the X-shaped section relative to each other to move the two substrate holders in reverse unison motion between extended and retracted positions.

Substrate transport apparatus with dual substrate holders

An articulated arm transfer device having a pair of upper arms and a pair of forearms. Each upper arm is rotatable at its shoulder end. Each forearm is rotatable at its wrist end. The elbow ends of the upper arms and the forearms are connected to each other by a link. The shoulder ends are mounted on a support in such a manner that one upper arm is rotated by a drive, and a holder for an object to be transferred is mounted on the wrist ends. The link includes shafts upon which the elbow ends are mounted. At least two S-bands connect the shafts in such a manner that rotation of one shaft in either direction causes rotation of the other shaft in the opposite direction. The elbow end of one upper arm is fixed to its shaft, while the elbow end of the other upper arm is rotatably mounted on its shaft. The elbow end of one forearm is rotatably mounted on the shaft to which the elbow end of an upper arm is fixed, and the elbow end of the other forearm is fixed to the shaft on which the elbow end of the other upper arm is rotatably mounted.

Articulated arm transfer device

The presence of an article at a specified location is detected by measuring a change in capacitance which is caused by the placement of the article at the specified location. The device used for this measurement includes an oscillator the frequency whereof is rendered highly sensitive to the capacitance being measured by structure which includes a triaxial cable and by electrical circuitry which includes a voltage follower circuit.

Sensor for articles such as wafers on end effector

An articulated arm transfer device employs a pair of upper arms each upper arm being rotatable at its shoulder end, and a pair of forearms each forearm being rotatable at its wrist end. The elbow ends of each pair are connected to each other by a link means. The shoulder ends are mounted on a support in such a manner that one upper arm is rotated by a drive means, and holding means for an object to be transferred is mounted on the wrist ends. The link means includes shafts upon which the elbow ends are mounted and at least two S-bands connecting the shafts in such a manner that rotation of one shaft in either direction causes rotation of the other shaft in the opposite direction. The elbow end of one upper arm is fixed to its shaft, while the elbow end of the other upper arm is rotatably mounted on its shaft. The elbow end of one forearm is rotatably mounted on the shaft to which the elbow end of an upper arm is fixed, and the elbow end of the other forearm is fixed to the shaft on which the elbow end of the other upper arm is rotatably mounted.

Valve mechanism for high-vacuum clean environments, wherein a slot aperture is closed by a gage having a lever. Motion of the gate which covers and uncovers the slot is imparted to the gate by longitudinal movement of the lever. Motion of the gate which seals and unseals the slot is imparted by pivoting movement of the level about a fulcrum near the center of the lever. The pivoting movement is imparted at a time different from that at which the longitudinal movement is imparted, and the pivoting movement may be imparted by means separate from that which imparts the longitudinal movement.

Valve

In a material transfer device, an articulated arm assembly extends and retracts in a 'froglike' motion to transfer an object between a plurality of locations. The articulated arm assembly is rotatable about a pivot point in a radial plane and can be raised or lowered in an axial direction to align the object with the intended destination. A greater degree of axial mobility may be provided, for example by a rotating lift screw. A vacuum chamber may be provided, with the arm assembly moving the object between locations in the chamber.

In a material transfer device, an articulated arm assembly extends and retracts in a 'froglike' motion to transfer an object between a plurality of locations. The articulated arm assembly is rotatable about a pivot point in a radial plane and can be raised or lowered in an axial direction.

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Carlisle, MA, United States of America

James C Davis, Jr