Micron Technology Incorporated

James B Franek

Srinivas Pulugurtha

Alex J Schrinsky

Jaydip Guha

Mohd Kamran Akhtar

Saurabh Keshav

Apparatus, such as electronic devices and structures thereof, include at least one doped surface of a base (e.g., semiconductor) material. A dopant of the at least one doped surface is concentrated along the surface, defining a thickness, on or in the base material, not exceeding about one atomic layer. Methods for forming the doped surfaces involve gas-phase doping exposed surfaces of the base material in situ, within a same material-removal tool used to form at least one opening defined at least partially by the base material and into which the dopant is to be introduced.

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Boise, ID, United States of America

James B Franek