Uber Technologies, Inc.

Uatc, LLC

Aurora Operations, Inc.

Kla-tencor Technologies Corporation

Kla Tencor Corporation

Apparate International C.v.

James Allen Haslim

Michael D Karasoff

Brent Schwarz

Nicholas M Iturraran

Michael Bryan Borden

Salam Harb

Kent Douglas

Jon Hamilton

Daniel Thomas Sing

Marek Zwyno

Marek Zywno

Dirk John VandenBerg, Iii

Thomas Lawrence Smith

Adam David Kenvarg

Brent S Schwarz

A LIDAR unit includes a housing defining a cavity. The LIDAR unit further include a plurality of emitters disposed on a circuit board within the cavity. Each of the emitters emits a laser beam along a transmit path. The LIDAR system further includes a first telecentric lens assembly positioned within the cavity and along the transmit path such that the laser beam emitted from each of the plurality of emitters passes through the first telecentric lens assembly. The LIDAR further includes a second telecentric lens assembly positioned within the cavity and along a receive path such that a plurality of reflected laser beams entering the cavity pass through the second telecentric lens assembly. The first telecentric lens assembly and the second telecentric lens assembly each include a field flattening lens and at least one other lens.

Multi-channel light detection and ranging (LIDAR) unit having a telecentric lens assembly and single circuit board for emitters and detectors

A LIDAR system includes a plurality of LIDAR units. Each of the LIDAR units includes a housing defining a cavity. Each of the LIDAR units further includes a plurality of emitters disposed within the cavity. Each of the plurality of emitters is configured to emit a laser beam. The LIDAR system includes a rotating mirror and a retarder. The retarder is configurable in at least a first mode and a second mode to control a polarization state of a plurality of laser beams emitted from each of the plurality of LIDAR units. The LIDAR system includes a polarizing beam splitter positioned relative to the retarder such that the polarizing beam splitter receives a plurality of laser beams exiting the retarder. The polarizing beam is configured to transmit or reflect the plurality of laser beams exiting the retarder based on the polarization state of the laser beams exiting the retarder.

Light detection and ranging (LIDAR) system having a polarizing beam splitter

A LIDAR assembly is provided. The LIDAR assembly includes a LIDAR unit. The LIDAR unit includes a housing defining a cavity. The LIDAR unit further includes a plurality of emitters disposed within the cavity. Each of the plurality of emitters is configured to emit a laser beam. The LIDAR assembly further includes a switchable mirror. The switchable mirror is positioned relative to the LIDAR unit such that the switchable mirror receives a plurality of laser beams exiting the housing of the LIDAR unit. The switchable mirror is configurable in at least a reflective state to direct the plurality of laser beams along a first path and a transmissive state to direct the plurality of laser beams along a second path that is different than the first path to widen a field of view of the LIDAR unit along a first axis.

Light detection and ranging (LIDAR) assembly having a switchable mirror

A LIDAR assembly defining a horizontal axis and a vertical axis is provided. The LIDAR assembly includes a LIDAR unit. The LIDAR unit includes a housing defining a cavity. The LIDAR unit further includes a first plurality of emitters disposed within the cavity and a second plurality of emitters disposed within the cavity. Each of the first plurality of emitters is configured to emit a first laser beam at a first wavelength. Conversely, each of the second plurality of emitters is configured to emit a second laser beam at a second wavelength that is different than the first wavelength. The LIDAR assembly includes an optic positioned outside of the housing. The optic is configured to optically act on the first laser beam and the second laser beam in a different manner to widen a field of view of the LIDAR unit along the vertical axis.

Light detection and ranging (LIDAR) assembly using a dichroic optic to widen a field of view

A LIDAR sensor includes a fiber laser configured to emit an electromagnetic pulse through a fiber cable, and a fiber cable splitter to split the fiber cable into a first fiber cable and a second fiber cable. The electromagnetic pulse is split into an output pulse that propagates through the first fiber cable and a calibration pulse that propagates through the second fiber cable. The LIDAR sensor includes a pulse receiving sensor configured to detect the calibration pulse and a second pulse corresponding to the output pulse being reflected by a surface external from the LiDAR sensor. A processor is included to receive information from the pulse receiving sensor indicating a position of the surface relative to the LiDAR sensor. The processor further measures an intensity of the calibration pulse and determines a reflectance of the surface based at least in part on the intensity of the calibration pulse.

LiDAR sensor

Aspects of the present disclosure involve systems, methods, and devices for fault detection in a Lidar system. A fault detection system obtains incoming Lidar data output by a Lidar system during operation of an AV system. The incoming Lidar data includes one or more data points corresponding to a fault detection target on an exterior of a vehicle of the AV system. The fault detection system accesses historical Lidar data that is based on data previously output by the Lidar system. The historical Lidar data corresponds to the fault detection target. The fault detection system performs a comparison of the incoming Lidar data with the historical Lidar data to identify any differences between the two sets of data. The fault detection system detects a fault condition occurring at the Lidar system based on the comparison.

Lidar fault detection system

A LiDAR sensor can include a laser, a directional sensor, a window, an electromagnetic pulse receiving sensor, and a processor. The laser can be configured to emit a narrow electromagnetic pulse. Further, the directional sensor can be configured to measure the direction of the narrow electromagnetic pulse emitted by the laser. The narrow emitted electromagnetic pulse can pass through the window. The pulse can then be reflected by at least the window and an object external from the LiDAR sensor, creating at least two reflected pulses. The electromagnetic pulse receiving sensor can be configured to measure the two reflected pulses resulting from the narrow pulse emitted by the laser. The processor can be configured to receive information from the sensors, indicating a position of the object relative to the LiDAR sensor. Further, the processor can be configured to measure the intensity of the pulse being reflected by the window.

LiDAR scanner

A light detection and ranging (LiDAR) sensor includes a single-mode fiber positioned to receive the outputted light from a laser. The LiDAR also includes an optical circulator, a multi-clad fiber, a first optical detector positioned to receive reflected light from an inner cladding of the multi-clad fiber, and a second optical detector positioned to receive the reflected light from a core of the multi-clad fiber.

Multi-clad fiber-based light detection and ranging sensor

A LiDAR sensor can include a laser configured to output electromagnetic pulses and an optical splitter positioned to split each of the electromagnetic pulses into (i) at least one calibration pulse, and (ii) at least one external pulse directed toward an object external from the LiDAR sensor. The LiDAR sensor can further include a photodetector configured to detect the at least one calibration pulse and a reflected pulse based on the at least one external pulse reflecting from the object. The LiDAR sensor can further include a processor configured to adjust a bias voltage of the photodetector based on the at least one calibration pulse.

Lidar scanner calibration

Methods and apparatus for light detecting and range sensing. In one approach, a light detecting and ranging (LiDAR) sensor uses an optical directing device; a multi-clad optical fiber, a light source, and a detector. The light source is optically coupled to the multi-clad optical fiber which is configured to receive optical rays transmitted from the light source and route the rays on an optical path leading to the optical directing device. The optical directing device is configured both to direct the transmitted optical rays routed through the multi-clad fiber towards a target to be sensed and direct optical rays reflected from the target on an optical path leading to the multi-clad optical fiber. The multi-clad optical fiber is configured to receive the reflected optical rays and route the reflected optical rays on an optical path leading to the detector. The detector is configured to detect the reflected optical rays.

Multi-clad fiber based optical apparatus and methods for light detection and ranging sensors

A LiDAR can include a laser, an avalanche photodiode, a splitter, and a processor. The laser can be configured to emit a narrow electromagnetic pulse. The avalanche photodiode can be configured to receive one or more electromagnetic pulses and output a response signal in response to said pulses. The photodiode can also be positioned to receive at least one reflected pulse, reflected by an object external from the LiDAR sensor and caused by the laser. The avalanche photodiode can also have a bias voltage applied to it affecting the response signal. The splitter can be positioned to receive the narrow electromagnetic pulse and split it into at least one external pulse directed toward the object external from the LiDAR sensor and at least one calibration pulse directed toward the photodiode. The calibration pulse directed toward the photodiode can be received by the photodiode before the pulse reflected by the object. The processor can be configured to receive response signals from the photodiode. Further, the processor can be configured to adjust the bias voltage according to a response signal caused by the calibration pulse to compensate for temperature changes of the photodiode.

LiDAR scanner calibration

Substrate support apparatus and methods are disclosed. Motion of a substrate chuck relative to a stage mirror may be dynamically compensated by sensing a displacement of the substrate chuck relative to the stage mirror and coupling a signal proportional to the displacement in one or more feedback loops with Z stage actuators and/or XY stage actuators coupled to the stage mirror. Alternatively, a substrate support apparatus may include a Z stage plate a stage mirror, one or more actuators attached to the Z stage plate, and a substrate chuck mounted to the stage mirror with constraints on six degrees of freedom of movement of the substrate chuck. The actuators impart movement to the Z stage in a Z direction as the Z stage plate is scanned in a plane perpendicular to the Z direction. The actuators may include force flexures having a base portion attached to the Z stage plate and a cantilever portion extending in a lateral direction from the base portion. The cantilever portion may include a parallelogram flexure coupled between the base portion and a free end of the cantilever portion.

Growing community of inventors

Dublin, CA, United States of America

James Allen Haslim