Edwards Limited

James Alexander Haylock

Nigel Paul Schofield

Ian Keech

Brent Haslett

Richard Lee Harkin

Andrew Grantham

Jian Li

Alexander James Patey

Michael Simmonds

Haitham Abdulrahman

Infra-red sensors are often used in turbo molecular pumps to detect the temperature of the rotor or other mechanical parts and therefore indicate imminent, or potential, running failures. As deposits build up on either the infra-red sensor, or on the surface being monitored, the reading given by the sensor may not be a true representation of the actual surface temperature which can cause the pump controller to fail to stop the pump in time. The present invention provides a method and device for calibrating the sensor by creating a determined temperature rise in the sensor whilst keeping the rotor at ambient temperature. In particular the present invention uses the motor stator as the heater for causing the temperature increase.

Temperature sensor for a high speed rotating machine

A vacuum system includes a vacuum pump and an electric motor for driving the vacuum pump. A cooling arrangement cools the vacuum system. A control performs at least one of decreasing voltage and increasing frequency of a signal applied to the electric motor to decrease an amount of magnetic flux generated in the electric motor instead of decreasing the current applied to the electric motor to arrive at a desired torque generated by the electric motor in response to pumping requirements of the vacuum pump.

Vacuum system

Scroll-type pumping apparatus comprises a stator () comprising a fixed scroll member () having an end plate with a first spiral wrap () extending therefrom; an orbital scroll member () having an end plate with a second spiral wrap () extending therefrom to intermesh with the first spiral wrap; a plurality of flexible supports () each having one end connected to the orbital scroll member and another end connected to the stator to support the orbital scroll member relative to the stator, and a linear drive system () for driving the orbital scroll member to orbit relative to the fixed scroll member. The use of a linear drive system in combination with the flexible supports can provide apparatus having no rotational or rubbing parts.

Scroll pump with an electromagnetic drive mechanism

Growing community of inventors

Eastbourne, United Kingdom

James Alexander Haylock