Applied Materials, Inc.

James A Stinnett

Steven C Shannon

Imad Yousif

Walter R Merry

Roger Alan Lindley

Ying Rui

Cynthia B Brooks

Masao Drexel

Ying Xiao

Jason Regis

A method and apparatus for confining a plasma are provided herein. In one embodiment, an apparatus for confining a plasma includes a substrate support and a magnetic field forming device for forming a magnetic field proximate a boundary between a first region disposed at least above the substrate support, where a plasma is to be formed, and a second region, where the plasma is to be selectively restricted. The magnetic field has b-field components perpendicular to a direction of desired plasma confinement that selectively restrict movement of charged species of the plasma from the first region to the second region dependent upon the process conditions used to form the plasma.

Magnetic confinement of a plasma

An oxide etching method, particularly applicable to forming through an oxide layer a wineglass shaped contact or via hole of controlled shape. The wineglass hole is particularly useful for eased metal hole filling. The bowl is etched by first etching an anisotropic hole through a mask aperture, and then isotropically etching through the same mask aperture. The relative periods of the anisotropic and isotropic etch determine the lateral-to-vertical dimensions of the bowl. The stem is then etched through the same mask aperture with a strongly anisotropic etch. The isotropic etch may be performed in the same chamber as the anisotropic etch or may advantageously be performed in a separate etch chamber having a remote plasma source.

Oxide plasma etching process with a controlled wineglass shape

A method of cleaning a substrate,to remove etchant residue,formed during etching of the substrate, the method comprising the step of exposing the substrate in a process zone,, to an activated cleaning gas comprising halogen-substituted saturated hydrocarbon gas, oxygen gas, and nitrogen gas.

Method for etching and cleaning a substrate

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Yorba Linda, CA, United States of America

James A Stinnett