Sporian Microsystems, Inc.

Jakob Oreskovich

Evan Pilant

Dale Schoonover

Eric Schneider

Brittany McGrogan

William VanHoose

Kevin Harsh

Steve Sheeran

Jon Lubbers

Alex Brand

Thomas Schahrer

Laura Ferlin

Lewis Wright

Samuel Hotaling

Bradley Smith

A method of shielding a capacitive pressure transducer by positioning an insulated shield spacer between the capacitor electrodes, covering the two electrodes with an electrically conductive shield box, applying a sensor voltage from a first voltage source across the two electrodes, and applying a shield voltage from a second voltage source to the insulated shield spacer and to the shield box.

Method of shielding capacitive pressure sensor

A capacitive pressure transducer includes a shielded spacer positioned between the capacitor electrodes and driven with a separate voltage source.

Driven-shield capacitive pressure sensor

Heat resistant sensors equipped with any of a variety of transducers for measuring any of a variety of properties of fluids are constructed with components comprising materials that can withstand very high temperatures. Some embodiments of the sensors include a first pressure sensitive element and a second pressure sensitive element with respective first and second membranes positioned in juxtaposed relation to each other to form a capacitor. Some embodiments include a pusher that extends from the membrane toward a first electrode. Some embodiments have a housing comprising a ceramic substrate with a sensor element mounted on an inside surface of the substrate. Other embodiments have direction sensing capabilities including a heater positioned in a core material and at least three temperature sensors located at or near the peripheral surface of the core material and spaced apart angularly in relation to each other.

Compact pressure and flow sensors for very high temperature and corrosive fluids

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Boulder, CO, United States of America

Jakob Oreskovich