Lam Research Corporation

Jaime Sarmiento

Paul Ballintine

Gean Hsu

Duane Smith

Tina Pai-Lin Ku

Chad R Weetman

Roopa Krishnaiah-Felton

Paul Ronald Ballintine

Tina Pai-Liu Ku

An architecture for creating a plasma-processing-related application is provided. The architecture includes a foundation layer having a plurality of framework components, wherein the framework components including at least one of security component, data management component and user interface (UI) component. The architecture also includes an analysis view layer having a set of views, wherein the set of views are generated utilizing components from the foundation layer. The architecture further includes an analysis module layer having a plurality of analysis modules, wherein each analysis module of the plurality of analysis modules is assembled from one or more view of the set of views. The architecture moreover includes an application layer having a plurality of applications, wherein each application of the plurality of applications is assembled from one or more analysis module.

Data architecture and user interface for plasma processing related software applications

A method for testing a component configured to be installed in a plasma processing system. The method includes providing an ATAC (Automated Test and Characterization) fixture, which includes a system control software package ( SCS) that is representative of production system control software, a data manager module configured to obtain specification data from a database over a computer network, a test manager module configured to execute a set of tests designed to test the component, a SCS interface engine configured to provide the set of tests to the SCS, and a data analysis module configured to provide computer-implemented data analysis tool for analyzing test data obtained from the testing the component. The method also includes coupling the ATAC fixture to the component to enable the SCS in the ATAC fixture to test the component utilizing the set of tests and at least a portion of the specification data.

Automated test and characterization data analysis methods and arrangement

A testing arrangement for testing a plasma cluster tool having system control software (SCS) for controlling the plasma cluster tool during production. The testing arrangement includes a data manager module for obtaining, via a computer network, specification data pertaining to a component of the plasma cluster tool. The testing arrangement further includes a test manager module configured to provide a set of tests for testing the component, the set of tests incorporating data obtained in the specification data. The testing arrangement additionally includes a SCS interface engine configured to communicate the set of tests with the system control software of the plasma cluster tool, thereby enabling the SCS to execute at least a test in the set of tests to test the component.

Automated test and characterization web services

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Tracy, CA, United States of America

Jaime Sarmiento