Other

Bruker Nano Gmbh

Jaime Duran

Dong Chen Chen

Joanna Schmit

Bryan W Guenther

Matthew Jarrod Novak

Son Hoang Bui

Shawn David McDermed

Henry Fagg

Tay-Chang Wu

John Christopher Boney

A conductive conformable braided wire is used as the edge electrode for material characterization of a semiconductor wafer. The braided wire is adapted to contact the perimeter of the n-GaN layer using a retractable support structure that alternately places the electrode in contact with the edge of the n-GaN layer and retracts it during repeated cycles of operation to test a plurality of similar wafers. The braided wire produced a very stable and higher electrical contact than any prior-art edge electrode.

Edge electrode for characterization of semiconductor wafers

A coordinate measuring machine is calibrated by taking optical measurements of an optical flat that includes a grating placed on its surface. The arm of the CMM capable of multi-directional translation in relation to an object is fitted with a white-light interferometric objective and optical measurements are taken of the flat while translating the objective (or the flat) in the coordinate direction subject to calibration. The objective may serve also as the probe of the CMM.

Optical plate for calibration of coordinate measuring machines

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Tucson, AZ, United States of America

Jaime Duran