Samsung Electronics Co., Ltd.

Jaihyuk Song

Dong-Jun Lee

Bongtae Park

Sungsu Moon

Changsub Lee

Jaeyoun Kim

Manki Lee

Non-volatile memory devices and related methods are provided. The non-volatile memory devices include a memory cell array having a plurality of cell strings, each cell string including: a plurality of memory cells stacked in a direction perpendicular to a substrate, a ground selection transistor between the plurality of memory cells and the substrate, and a string selection transistor between the plurality of memory cells and a bit line; an address decoder coupled to the plurality of memory cells in the plurality of cell strings through word lines, to the string selection transistors in the plurality of cell strings through string selection lines, and to the ground selection transistors in the plurality of cell strings through a ground selection line; a read/write circuit coupled to the string selection transistors in the plurality of cell strings through the bit lines; and control logic configured to adjust a substrate voltage applied to the substrate such that threshold voltages of the ground selection transistors are higher than a predetermined level during read operations for at least one of the plurality of memory cells in the plurality of cell strings.

Non-volatile memory devices and related operating methods

Provided are a semiconductor device and a method of fabricating the same. The semiconductor device includes lateral and upper hydrogen blocking patterns disposed to prevent hydrogen from diffusing into the cell array region. Accordingly, hydrogen is effectively prevented from being trapped in a tunnel dielectric, thereby improving the reliability of the semiconductor device. In the method, when a cell array contact plug is formed, a lateral hydrogen blocking pattern and an upper hydrogen blocking pattern are formed at the same time. Thus, an additional process for forming a hydrogen blocking pattern is unnecessary, thereby simplifying a process.

Semiconductor device and method of fabricating the same

Growing community of inventors

Seongnam-si, South Korea

Jaihyuk Song