Samsung Electronics Co., Ltd.

Jai-hyung Won

Seung-Ki Chae

Do-hyung Kim

Young-Tae Kim

Tai-Kyung Kim

Ho-Jun Kim

Sung-hyup Kim

Ui-hui Kwon

Dong-Hoon Han

Kwang-Ho Cha

Gyeong-su Keum

Won-young Chung

Young-kwan Park

A semiconductor process management system is provided. The semiconductor process management system includes a communicator that receives a process recipe from one or more process apparatuses and receives a measured value for each sampling point from one or more measuring apparatus, and a first determination unit that establishes a mutual influence model between the process recipe and the measured value for each sampling point based on the process recipe and the measured value for each sampling point.

Semiconductor process management system, semiconductor manufacturing system including the same, and method of manufacturing semiconductor

The present invention can provide ion implanter devices including an arc chamber including at least a first inner region and a second inner region, an electron emitting device disposed in the arc chamber adjacent the first inner region and adapted to emit electrons, an electron returning device disposed in the arc chamber adjacent the second inner region and adapted to return at least some of the electrons emitted from the electron emitting device into the second inner region; and an electric field and magnetic field generating device adapted to provide a magnetic field to the arc chamber, wherein at least one inner wall of the arc chamber has a convex surface.

Ion implanters having an arc chamber that affects ion current density

Growing community of inventors

Seoul, South Korea

Jai-hyung Won