Samsung Electronics Co., Ltd.

Jaeran Jang

Deokhan Bae

Hwichan Jun

Heonjong Shin

Yoonhae Kim

YoungWoo Cho

Moon Gi Cho

Kyungin Choi

Suehye Park

A semiconductor device includes a substrate including a first region and a second region, a cell gate pattern on the first region of the substrate, a dummy gate pattern on the second region of the substrate, a resistor pattern on the second region of the substrate and over the dummy gate pattern, and a connection structure coupled to each of the connection regions. The resistor pattern includes a body region and connection regions at both sides of the body region. The dummy gate pattern overlaps the body region and does not be overlap the connection regions, when viewed in a plan view.

Semiconductor device

Methods of fabricating a semiconductor device include forming a gate pattern on a substrate, forming spacers to cover both sidewalls of the gate pattern, forming an interlayer insulating layer to cover the gate pattern and the spacers, and forming contact holes to penetrate the interlayer insulating layer and expose sidewalls of the spacers. The forming of the spacers includes forming a spacer layer to cover the gate pattern and injecting silicon ions into the spacer layer. The spacer layer is a nitride-based low-k insulating layer, whose dielectric constant is lower than that of silicon oxide.

Methods of fabricating semiconductor devices

A semiconductor device includes a substrate provided with active patterns, gate electrodes extending across the active patterns, source/drain regions provided in upper portions of the active patterns between the gate electrodes, respectively, and first contacts and second contacts provided between the gate electrodes and electrically connected to the source/drain regions, respectively. The first and second contacts are disposed in such a way that a contact center line thereof is spaced apart from a corresponding gate center line by first and second distances. The first distance differs from the second distance.

Semiconductor device and method of fabricating the same

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Suwon-si, South Korea

Jaeran Jang