Samsung Electronics Co., Ltd.

Jaejoong Lee

Sungyeol Kim

Seungbo Shim

Yongwon Cho

Sungyong Lim

Hyungjung Yong

Younghwan Choi

Chunyoon Park

A radio frequency (RF) generating device for generating RF output signals is provided. The RF generating device includes: a controller configured to generate an RF control signal and a gain control signal; a plurality of RF signal generators, each RF signal generator being configured to generate an RF signal having at least one of a frequency and a phase determined based on the RF control signal; a plurality of RF amplification modules, each RF amplification module being configured to receive the RF signal generated by a corresponding RF signal generator and generate an RF amplification signal by controlling a gain of the RF signal based on the gain control signal; an RF switch module configured to select at least one of the RF amplification signals generated by the RF amplification modules and generate an RF output signal in a form of a multi-level pulse based on the selected at least one of the RF amplification signals; and an impedance converter connected to an electrode of an external load and configured to convert a load impedance into a target impedance having a target range, the load impedance being an impedance of the external load.

RF generating device and semiconductor manufacturing apparatus including the same

Growing community of inventors

Suwon-si, South Korea

Jaejoong Lee