Samsung Electronics Co., Ltd.

Jaeil Lee

Youngsun Lee

Min-Kyung Kim

Seonggoo Kang

JungWook Lee

Kyoungcho Na

SuJeong Hwang

Chulwoong Jang

An overlay measurement method for accurately measuring and correcting an overlay in an environment in which a deep ultraviolet (DUV) apparatus and an extreme ultraviolet (EUV) apparatus are used together, a semiconductor device manufacturing method using the overlay measurement method, and an overlay measurement apparatus are provided. The overlay measurement method includes performing an absolute measurement of a position of an overlay mark of at least one of a plurality of layers, based on a fixed position, wherein an exposure process is performed on a first layer of the plurality of layers by using the DUV apparatus, and an exposure process is performed on an nth layer of the plurality of layers, which is an uppermost layer of the plurality of layers, by using the EUV apparatus.

Overlay measurement method, semiconductor device manufacturing method using the same, and overlay measurement apparatus

A bispecific antigen binding protein complex comprising a first polypeptide comprising a first antigen binding site at an N terminus; a second polypeptide comprising a second antigen binding site at an N terminus; and a linker connecting the first polypeptide and the second polypeptide; wherein the linker comprises a tag at one terminus thereof, and wherein the tag is connected to a C-terminus of the first polypeptide or to an N-terminus of the second polypeptide, and comprises a cleavable amino acid sequence; as well as related compositions and methods.

Bispecific antigen binding protein complex and preparation methods of bispecific antibodies

Provided are apparatus and method of testing solid state drives. The method includes accommodating solid state drives to be tested in a magazine with one or more cassettes, sorting the solid state drives into operable solid state drives or defective solid state drives by testing electrical characteristics, and loading the sorted solid state drives.

Solid state drive testing apparatus to sort the solid state drives according to a determined operability of each drive

Growing community of inventors

Yongin-si, South Korea

Jaeil Lee