Lg Chem, Ltd

Mks Instruments, Inc.

Plasmart Inc.

Aether Inc.

Jaehyun Kim

Sang Won Lee

David J Coumou

Aaron T Radomski

Cheol Hee Park

Larry J Fisk, Ii

Jonathan W Smyka

Sang-Won Lee

Su Jeong Lee

Sujeong Lee

Yong Gwan Lee

Yeseul Lee

Inshik Bae

Larry J Fisk Ii

One aspect of the present invention relates to a device for managing a fine particle concentration of a target region by supplying charges to a target region, the device comprising: a container configured to store liquid, at least one nozzle configured to output the liquid, a pump configured to supply the liquid from the container to the at least one nozzle, a power supply configured to supply power to the device, and a controller configured to supply the charges to the target region through the at least one nozzle by using the power supply, wherein the controller is configured to, by using the power supply, apply a voltage equal to or greater than a reference value to the at least one nozzle, and provide electric force in a direction away from the device to the fine particles in the target region charged by the supplied charges.

Device and method for managing fine particle concentration

A thermoelectric material which minimize the content of components that degrade thermoelectric performance and thus can be usefully used in thermoelectric devices including the same.

Thermoelectric material and thermoelectric device including the same

Provided are an RF power distribution device and an RF power distribution method. The RF power distribution device includes an impedance matching network for transferring power from an RF power source and a power distribution unit for distributing the output power from the impedance matching network to at least one electrode generating capacitively-coupled plasma. The power distribution unit includes a first reactive element connected in series to a first electrode, a variable capacitor having one end connected in parallel to the first reactive element and the first electrode and the other end grounded, and a second reactive element having one end connected to a first node where the one end of the variable capacitor and one end of the first reactance device are in contact with each other and the other end connected to a second node where a second electrode and an output terminal of the impedance matching network are connected.

RF power distribution device and RF power distribution method

A radio frequency (RF) system is disclosed. The RF system includes an RF sensor, an analog to digital converter (ADC) module, a processing module, and a synchronization module. The RF sensor measures a parameter of an RF output and generates an RF signal based on the parameter. The ADC module converts samples of the RF signal into digital values. The processing module generates processed values based on the digital values. The synchronization module outputs one of the processed values in response to a transition in the RF output.

Synchronization of RF pulsing with RF metrology, processing, and control

Growing community of inventors

Daejeon, South Korea

Jaehyun Kim