Samsung Electronics Co., Ltd.

JaeHee Oh

Kyung-Chang Ryoo

Sung-Ho Eun

Jihyung Kim

Daehwan Kang

Heung Jin Joo

Jeonghoon Ahn

Wonji Park

Hongsik Jeong

Ji-Hyun Jeong

Shaofeng Ding

Sang-Su Park

Byoungjae Bae

Myung Jin Kang

Yunki Choi

Minguk Kang

Hyun Goo Jun

Jegwan Hwang

Jihyung Yu

A metal-insulator-metal capacitor includes a first electrode disposed in a first region of an upper surface of a substrate, a second electrode covering the first electrode and extending to a second region surrounding an outer periphery of the first region, a third electrode covering the second electrode and extending to a third region surrounding an outer periphery of the second region, a first dielectric layer disposed between the first electrode and the second electrode to cover an upper surface and a side surface of the first electrode and extending to the second region, and a second dielectric layer disposed between the second electrode and the third electrode to cover an upper surface and a side surface of the second electrode and extending to the third region and in contact with the first dielectric layer.

Metal-insulator-metal capacitor

A method of estimating warpage of an interposer and a method of manufacturing a semiconductor package by using the same are disclosed. The interposer includes a through electrode passing through a substrate, and a plurality of metal wiring layers and a plurality of insulating layers on the substrate, and the method of estimating warpage of an interposer includes: performing a temperature sweep test by using sample interposers, and measuring warpages according to temperatures; deriving a warpage slope, as a function of temperature, of each of the sample interposers; deriving a warpage model by linearly fitting the warpage slope with respect to an average pattern density of metal wiring layers in each of the sample interposers; and calculating a room temperature warpage reference value of the interposer based on the warpage model.

Methods of estimating warpage of interposers and methods of manufacturing semiconductor package by using the same

A method of generating neuron spiking pulses in a neuromorphic system is provided which includes floating one or more selected bit lines connected to target cells, having a first state, from among a plurality of memory cells arranged at intersections of a plurality of word lines and a plurality of bit lines; and stepwisely increasing voltages applied to unselected word lines connected to unselected cells, having a second state, from among memory cells connected to the one or more selected bit lines other than the target cells having the first state.

Neuromophic system and configuration method thereof

A variable resistance memory system includes a variable resistance memory device including a memory cell array including first and second areas; and a memory controller configured to control the variable resistance memory device. The first area includes first variable resistance memory cells including a first variable resistance material layer and the second area includes second variable resistance memory cells including a second variable resistance material layer having a metallic doping concentration higher than a metallic doping concentration of the first variable resistance material layer. The first variable resistance memory cells are used as storage and the second variable resistance memory cells are used as a buffer memory.

Variable resistance memory device and a variable resistance memory system including the same

A nonvolatile memory device includes a substrate and a first insulating layer on the substrate. The first insulating layer includes a first opening therein. A lower electrode is provided in the first opening and protrudes from a surface of the first insulating layer outside the first opening. An electrode passivation pattern is provided on a sidewall of the lower electrode that protrudes from the surface of the first insulating layer. A second insulating layer is provided on the first insulating layer and includes a second opening therein at least partially exposing the lower electrode. A variable resistance material layer extends into the second opening to contact the lower electrode. The electrode passivation layer electrically separates the sidewall of the lower electrode from the variable resistance material layer. The electrode passivation pattern is formed of a material having an etching selectivity to that of the second insulating layer. Related fabrication methods are also discussed.

Variable resistance memory devices having reduced reset current

A phase change memory is manufactured by providing a substrate including a layer of phase-change material, forming a damascene pattern on the layer of phase-change material, and forming both a top electrode and a bit line in the damascene pattern.

Methods of manufacturing phase change memory devices

Methods of forming a variable-resistance memory device include patterning an interlayer dielectric layer to define an opening therein that exposes a bottom electrode of a variable-resistance memory cell, on a memory cell region of a substrate (e.g., semiconductor substrate). These methods further include depositing a layer of variable-resistance material (e.g., phase-changeable material) onto the exposed bottom electrode in the opening and onto a first portion of the interlayer dielectric layer extending opposite a peripheral circuit region of the substrate. The layer of variable-resistance material and the first portion of the interlayer dielectric layer are then selectively etched in sequence to define a recess in the interlayer dielectric layer. The layer of variable-resistance material and the interlayer dielectric layer are then planarized to define a variable-resistance pattern within the opening.

Methods of forming variable-resistance memory devices and devices formed thereby

Provided are a semiconductor device and a method of forming the semiconductor device. The method may include forming a semiconductor pattern on a substrate, forming an interlayer insulating layer including an opening exposing the semiconductor pattern, forming a semiconductor ohmic pattern on the semiconductor pattern, forming an electrode ohmic layer on the semiconductor ohmic pattern, performing a wet etching on the electrode ohmic layer, and forming an electrode pattern on the etched electrode ohmic layer.

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Seongnam-si, South Korea

JaeHee Oh