Korea Advanced Institute of Science and Technology

Jae-young Yoo

Jun-Bo Yoon

Min-Ho Seo

A pressure sensor includes a substrate whose top surface is formed in the form of a projection, a first electrode formed on one side of the top surface of the substrate, a second electrode formed on the other side of the top surface and spaced apart from the first electrode; and a dielectric material layer formed on the top surface of the substrate and fills a space between the first electrode and the second electrode. A pressure applied in a direction perpendicular to the top surface of the substrate causes a change in the dielectric constant of the dielectric material layer. The magnitude of the pressure is sensed by detecting a capacitance which changes according to the change in the dielectric constant. The projection forms a stress concentration structure, through which the dielectric constant change amount according to the pressure becomes larger, thereby improving sensitivity of the pressure sensor.

Growing community of inventors

Daejeon, South Korea

Jae-young Yoo