Samsung Electronics Co., Ltd.

Jae-youn Wi

Yu-sin Yang

Hyun-woo Kim

Chung-sam Jun

Sang-kil Lee

Young-Hwan Kim

Woo-seok Ko

Hyung-Su Son

Jeong-hoi Kim

Baek-man Sung

Chae-ho Shin

A conductive atomic force microscope including a plurality of probe structures each including a probe and a cantilever connected thereto, a power supplier applying a bias voltage, a current detector detecting a first current flowing between a sample object and each of the probes and a second current flowing between a measurement object and each of the probes, and calculating representative currents for the sample and measurement objects based on the first and second currents, respectively, and a controller calculating a ratio between representative currents of the sample object measured by each of the probe structures, calculating a scaling factor for scaling the representative current with respect to the measurement object measured by each of the probes, and determine a reproducible current measurement value based on the second measurement current and the scaling factor may be provided.

Conductive atomic force microscope and method of operating the same

Growing community of inventors

Suwon-si, South Korea

Jae-youn Wi