Samsung Electronics Co., Ltd.

Semes Co., Ltd.

Jae-Woong Hwang

Jong-Woo Sun

Jong-Hwan An

Hyung-Joo Lee

Jeong-Il Mun

Ja-Myung Gu

A calibrator of an OES may include a cover, a reference light source and a controller. The cover may be detachably combined with a ceiling of a plasma chamber of a plasma processing apparatus. The reference light source may be installed at the cover to irradiate a reference light to the OES through an inner space of the plasma chamber. The controller may compare a spectrum of the reference light inputted into the OES with a spectrum of an actual light inputted into the OES during a plasma process in the plasma chamber to calibrate the OES. Thus, the OES may be calibrated without disassembling of the OES from the plasma chamber to decrease a time for calibrating the OES.

Growing community of inventors

Goyang-si, South Korea

Jae-Woong Hwang