Samsung Electronics Co., Ltd.

Korea Advanced Institute of Science and Technology

Jae-Won Jeong

Mi-Jeong Kim

Nam-Su Yuk

Yeon-Sik Jung

Ho-Youl Lee

Ju-No Park

Woon-Ik Park

Jae-Young Eom

A nano-structured block copolymer that includes a self-assembled block copolymer disposed on a substrate, wherein the block copolymer includes a plurality of block structural units, and at least two block structural units have a solubility parameter difference of greater than or equal to about 5 megaPascal.

Nano-structure of block copolymer and method of manufacturing the same

A substrate transporting apparatus includes a first light emitting sensor emitting a first sensing light in a first direction, a first light receiving sensor receiving the first sensing light, a second light emitting sensor emitting a second sensing light in a second direction different than the first direction, a second light receiving sensor receiving the second sensing light, a substrate transporting loader passing through traveling lines of the first sensing light and the second sensing light, a state information storage unit storing state information of the substrate transporting loader, and an operation information computing unit computing operation information of the substrate transporting loader based on the state information.

Substrate transporting apparatus and method of operating the same

Growing community of inventors

Daejeon, South Korea

Jae-Won Jeong