Yonsei University

Korea Institute of Machinery & Materials

Jae Won Hahn

Ki Wook Han

Hyeon Bo Shim

Eung-Sug Lee

Joo Yun Jung

Jun Hyuk Choi

Joo Kwon Song

A light-transmissive multispectral stealth device is disclosed. The light-transmissive multispectral stealth device includes a selective wavelength absorption pattern layer including conductive thin-film patterns, wherein each of the conductive thin-film patterns is made of a material capable of transmitting visible light therethrough and having electrical conductivity, wherein the conductive thin-film patterns are capable of inducing an electromagnetic resonance at a first wavelength and a second wavelength different from the first wavelength; a dielectric layer disposed under the selective wavelength absorption pattern layer and made of a dielectric material capable of transmitting the visible light therethrough, wherein the dielectric layer together with the selective wavelength absorption pattern layer induce the electromagnetic resonance; and a reflective layer disposed under the dielectric layer, wherein the reflective layer is made of a material capable of transmitting the visible light therethrough and reflecting at least a portion of an infrared ray therefrom.

Light-transmissive multispectral stealth device

Disclosed is a stealth device that has a double-band stealth function against millimeter-wavelength electromagnetic waves, has high absorption at a near-infrared laser wavelength, and has low emissivity of mid-infrared light and long-infrared light. The stealth device includes a wavelength-selective absorption pattern layer made of a material having electrical conductivity, wherein the wavelength-selective absorption pattern layer is composed of conductive thin-film patterns capable of causing plasmonic resonance at a first wavelength and a second wavelength different from the first wavelength; and a dielectric layer disposed below the wavelength-selective absorption pattern layer and made of a dielectric material.

Stealth device

The present invention relates to an infrared stealth element using a dual band perfect absorption metamaterial. The infrared stealth element includes: a first metal layer; an insulator layer formed on an upper part of the first metal layer; and a second metal layer formed on an upper part of the insulator layer. The second metal layer includes at least one among a metal ring and a metal dot.

Infrared stealth element using dual band perfect absorption metamaterial

A device for a device for preventing the intensity reduction of an optical signal, an optical emission spectrometer, an optical instrument, and a mass spectrometer including the same are provided. The device for preventing the intensity reduction includes a shielding filter which has a mesh structure capable of blocking RF electromagnetic waves radiated from a plasma field for a wafer processing, is installed in the front of an optical window of an optical emission spectrometer for measuring the plasma field from an emission spectrum image of the plasma field, and collects charging particles passing through the mesh.

Device for preventing intensity reduction of optical signal, optical emission spectrometer, optical instrument, and mass spectrometer including the same

There is provided a method of manufacturing a stamp for a plasmonic nanolithography apparatus. The method includes forming metal patterns on a substrate, coating a hydrophobic thin film on external surfaces of the metal patterns to hydrophobic processing the external surfaces of the metal patterns, selectively hydrophilic processing only the external surfaces of the metal patterns, laminating a buffer layer on the substrate and the metal patterns, and transcribing the metal patterns and the buffer layer from the substrate to a base formed of light transmission material to be combined with the base.

Method of manufacturing stamp for plasmonic nanolithography apparatus and plasmonic nanolithography apparatus

A contact type plasmonic nano optical probe, a parallel probe constituted of the same, a plasmonic optical apparatus including the parallel probe, and a method of fabricating the parallel probe are disclosed. A contact type plasmonic nano optical probe includes a probe tip which protrudes in a truncated shape having a narrower plan surface and a wider plan surface relatively wider than the narrower plan surface, of which a metal thin film is coated on a surface, of and which an aperture of nm diameter included in a portion of the metal thin film on a central portion of the narrower plan surface, a spring structure disposed at a perimeter of the probe tip and configured to maintain a distance between the probe tip and a film to be exposed, a dielectric filled within the aperture, and a protection layer disposed on the narrower plan surface of the probe tip. Here, an optical transport path is included within the probe tip to be connected to the aperture. A plasmonic optical apparatus including a parallel plasmonic probe is constituted of a probe array including a plurality of probe modules in which the contact type plasmonic nano optical probes are disposed at a uniform distance on a substrate.

Contact type plasmonic nano optical probe, parallel probe constituted of the same, plasmonic optical apparatus including the parallel probe, and a method of fabricating the parallel probe

A high density information storage medium includes a recording layer in which information is stored; a thin metal film placed on the recording layer and having a structure in which nano-apertures having a size of several nanometers to several hundred nanometers are defined at regular intervals; and a protective layer placed on the thin metal film. As light irradiated from above the protective layer passes through the nano-apertures, physical characteristics of the recording layer are changed, whereby information is stored.

High density information storage medium having plasmonic nano device

Disclosed are a lens structure, an optical system including the same, and a lithography method using the optical system. The disclosed lens structure includes: a lens that has a substantially semispherical shape and includes a protruding portion having a truncated cone shape that is provided on its aspherical surface; a thin metal film that is formed on the surface of the protruding portion, and has an aperture formed at a position corresponding to the center of an upper surface of the protruding portion; and an immersion layer that is formed with a constant thickness on the upper surface of the protruding portion.

Lens structure, optical system having the same, and lithography method using the optical system

An optical modulating fine aperture array device is provided. The device includes a spatial light modulation unit provided with at least one light capacity cell arranged in a shape of a matrix, wherein each of the light capacity control cells is capable of individually controlling a degree of an inputted light which passing therethrough. A micro-lens array is provided with at least one micro-lens arranged in a shape of a matrix, wherein each of the micro-lenses condenses the light passing through each of the light capacity control cells. A substrate is made of an optical transparent material. The micro-lens array is attached to one side of the substrate. An aperture array is arranged on other side surface of the substrate and provided with at least one fine aperture. An immersion thin film layer is made of an optically transparent dielectric, including and formed to have a predetermined thickness from the aperture array.

Light-modulating nano/micro scale aperture array device having immersion layer and high speed nano scale pattern recording system using the same

A two-dimensional light-modulating fine aperture array apparatus includes a spatial light-modulating unit for adjusting quantity of incident light by using a plurality of light amount adjusting cells (liquid crystal cells or micromirrors) arrayed in matrix form, a two-dimensional microlens array having microlenses which focus light beams passing through the light quantity adjusting cells, and a highly efficient two-dimensional fine aperture array. The light is emitted through the fine apertures by connecting the two-dimensional light-modulating fine aperture array apparatus with a light source unit. A scanning unit moves in the x and y directions to perform a scanning process on a surface of a recording medium by using the light emitted from the apertures.

Growing community of inventors

Seoul, South Korea

Jae Won Hahn