Samsung Electronics Co., Ltd.

Jae-Sun Choi

Kyung-Wan Nam

Kab-Joo Lee

Jin-Su Jung

Ki-Joong Jang

Chi-Ho Han

The present invention provides a semiconductor manufacturing apparatus having a slit valve control system including first and second process chambers disposed adjacent to each other, a slit aperture disposed between the first and second chambers, a slit valve to open and close the slit aperture between first and second chambers, an air source to operate the slit valve, a pressure supply flow path connecting the slit valve with the air source, and a pressure regulator installed on the supply flow path to regulate pressure supplied from the air source to the slit valve.

Semiconductor manufacturing apparatus and control method thereof

A bitmap manager, a method of allocating a bitmap memory, a method of generating an acknowledgement between network entities, and a network entity implementing the same. The bitmap manager may include a bitmap memory for storing a block acknowledge of received frames based on a bitmap, a bitmap management information controller for receiving a bitmap entry number and storing bitmap management information associated with the physical address of the bitmap memory, and a bitmap manager finite state machine (BM FSM), receiving an update or an extract request for the received frames, managing the bitmap management information, and updating or extracting the bitmap memory.

Bitmap manager, method of allocating a bitmap memory, method of generating an acknowledgement between network entities, and network entity implementing the same

Growing community of inventors

Yongin-si, South Korea

Jae-Sun Choi