Samsung Electronics Co., Ltd.

Jae-sik Min

Seo-hyun Cho

Byung-ha Park

Kyong-il Kim

Young-ung Ha

Yong-shik Park

Sung-joon Park

Myung-song Jung

Sang-wook Lee

Myung-jong Kwon

Keon Kuk

Tae-Kyun Kim

Sung-Joon Park

Yong-soo Oh

Chang-seung Lee

Sang-hyun Lee

Tae-kyun Kim

Hyeon-Cheol Kim

Jong-cheol Shin

Jun-hyub Park

Seog Soon Baek

Kwang-joon Yoon

Sang-chul Koh

Yun-Gi Kim

Myong-jong Kwon

Eun-bong Han

O-hyun Beak

Nam-kyun Kim

Kang-Soo Chu

Young-shik Park

Sang-cheol Ko

A method of manufacturing an inkjet printhead, including forming a nozzle layer by radiating actinic radiation to a cross-linked polymer resist composition including a precursor polymer, a cationic photoinitiator, and a solvent, in which a concentration of the cationic photoinitiator is varied to control a tapered angle of a nozzle included in the nozzle layer.

Method of manufacturing inkjet printhead and inkjet printhead manufactured using the method

An ink-jet printhead and a manufacturing method thereof include a substrate on which a space portion is formed, a passage plate installed on the substrate in which an ink chamber is formed to store ink, a nozzle plate installed at a top surface of the passage plate in which a nozzle is formed to eject the ink, and a vibration plate disposed between the substrate and the passage plate to generate a pressure for ejecting the ink by changing a volume of the ink chamber. The vibration plate includes a base layer formed at a top surface of the substrate so as to cover at least a part of the space portion, a thin film shape memory alloy layer which contacts the ink contained in the ink chamber and varies according to a temperature variation, a heating element disposed between the base layer and the thin film shape memory alloy to generate heat, and an insulating layer disposed between the heating element and the thin film shape memory alloy layer and transfers the heat generated by the heating element to the thin film shape memory alloy layer. Due to a stable temperature coefficient of resistance (TCR) of the heating element, a height and a width of a voltage supplied to the heat element can be easily controlled, and thus power of the vibration plate can be precisely controlled, thereby having a predetermined image quality, and the heating element does not contact directly the ink, thereby realizing stability of the ink-jet printhead.

Ink-jet printhead and manufacturing method thereof

A heat transfer type ink-jet print head and a method of fabricating the same. A method of fabricating an ink-jet print head includes sequentially laminating a heat generation layer and an electrode layer on a substrate, laminating a protective layer on the top surfaces of the electrode layer and the heat generation layer by sequentially laminating a first protective layer and a second protective layer on the top surfaces of the electrode layer and the heat generation layer, and laminating an ink chamber barrier and a nozzle plate on the top surface of the protective layer to form an ink chamber to prevent defects such as 'pin-holes' from being generated during the formation of the first protective layer.

Ink-jet printer head having laminated protective layer and method of fabricating the same

An inkjet print head and method of fabricating the same. The inkjet print head includes: a substrate having an ink-feed hole, an interlayer dielectric layer formed around the ink-feed hole on the substrate, at least one metal layer formed on the interlayer dielectric layer, and an anti-moisture part formed between the ink-feed hole and the at least one metal layer to prevent ink moisture in the ink-feed hole from contacting the at least one metal layer. The inkjet print head and the method of fabricating the same are capable of preventing problems such as de-lamination between layers, electrical short-circuit, circuit malfunction, and corrosion of a metal interconnection layer, since it is possible to prevent penetration of ink moisture from layers having absorbent characteristics into the metal interconnection layer, a logic region, or a pressure driving part. Therefore, it is possible to improve the lifespan and reliability of the inkjet print head as well as to increase productivity and reduce manufacturing cost by increasing yield.

Inkjet print head and method of fabricating the same

An inkjet printhead and a method of manufacturing the same. In the inkjet printhead, a substrate includes an ink chamber formed in a top surface to contain ink to be ejected, an ink feedhole formed in a bottom surface to supply the ink to the ink chamber, and a restrictor formed between the ink chamber and the ink feedhole to connect the ink chamber and the ink feedhole. A plurality of passivation layers are formed on the substrate. A heater and a conductor to apply a current to the heater are formed between the passivation layers. A heat transfer layer is formed on the passivation layers in a predetermined shape. An epoxy nozzle layer is formed to cover the passivation layers and the heat transfer layer. The epoxy nozzle layer is formed with a nozzle that is connected to the ink chamber.

Inkjet printhead and method of manufacturing the same

A thermal inkjet printhead includes a substrate, an insulation layer formed on the substrate, a heater formed on the insulation layer, a conductor formed on the heater to supply a current to the heater, a chamber layer stacked on the insulation layer having the heater and the conductor therebetween, and having an ink chamber to be filled with ink to be ejected formed therein; a nozzle layer stacked on the chamber layer and having a nozzle through which the ink in the ink chamber is to be ejected, and a plurality of thermal plugs formed in a lower portion of the insulation layer to contact the insulation layer and the substrate and to dissipate heat generated by the heater toward the substrate.

Thermal inkjet printhead

A head of an inkjet printer is formed by bonding of a heater substrate and a nozzle plate. In order to bond the heater substrate where a heater thin film and a protecting film are vapor-deposited, and the nozzle plate where a nozzle is formed, an intermediate layer is formed by forming a thin film of glass on the heater substrate by vapor-depositing, and the nozzle plate is installed on the heater substrate. SiOis formed at an interface between the nozzle plate and the heater thin film due to heating and application of an electric field, and thus the nozzle plate and the heater substrate are bonded with an electrostatic force of SiO. The nozzle plate and the heater substrate are bonded by using the intermediate layer made of the thin film of glass instead of a general polymer as the bonding layer, thereby preventing swelling of the polymer and isolation of layers of the head occurring due to ink penetration into interfaces of the layers. Moreover, a bonding process is performed in wafer units to improve mass productivity.

Head of inkjet printer and method of manufacturing the same

An inkjet printhead includes a substrate having an ink chamber which is filled with ink to be ejected, a nozzle plate formed on the substrate in a position corresponding to the ink chamber, and a heat generating resistor installed in the ink chamber and formed of TiN, where x ranges from 0.2 to 0.5, to generate ink bubbles in the ink by generating heat.

Inkjet printhead with heat generating resistor

An ink-jet printhead and a method of manufacturing the same include a substrate on which a heater and a passivation layer protecting the heater are formed, a passage plate on which an ink chamber corresponding to the heater and an ink passage connected to the ink chamber are formed, and a nozzle plate in which an orifice corresponding to the ink chamber is formed. An exposure stop layer (ESL) that blocks passage of a photosensitive energy is formed inside the nozzle plate, and the nozzle plate and the passage plate are bonded with each other by the exposure stop layer (ESL).

Monolithic ink-jet printhead and method of manufacturing the same

An ink jet head substrate, an ink jet head and method of manufacturing the ink jet head substrate. The ink jet head substrate includes a supporting structure and at least one heat-generating resistor disposed on the supporting structure to generate a thermal energy to eject ink and made of metal carbon nitride. The metal carbon nitride is represented as a chemical formula of MCNwhere M is metal, X is within about 20 through 80, Y is within about 3 through 25, and Z is within about 10 through 60, when X+Y+Z=100. Further, the heat-generating resistor has a resistivity of 300&#x2dc;2000 &#x3bc;&#x3a9;&#xb7;Cm.

Ink jet head substrate and ink jet head having metal carbon nitride resistor

A heat transfer type ink-jet print head and a method of fabricating the same. A method of fabricating an ink-jet print head includes operations of sequentially laminating a heat generation layer and an electrode layer on a substrate, laminating a protective layer on the top surfaces of the electrode layer and the heat generation layer by sequentially laminating a first protective layer and a second protective layer on the top surfaces of the electrode layer and the heat generation layer, and laminating an ink chamber barrier and a nozzle plate on the top surface of the protective layer to form an ink chamber, wherein defects such as 'pin-holes' generated during the formation of the first protective layer are removed by applying a plasma on the first protective layer, and the second protective layer is laminated on the top surface of the first protective layer after any defect produced when laminating the first protective layer is removed.

A method for manufacturing the same, wherein the monolithic ink-jet printhead includes a manifold for supplying ink, an ink chamber having a hemispheric shape, and an ink channel formed monolithically on a substrate; a silicon oxide layer, in which a nozzle for ejecting ink is centrally formed in the ink chamber, is deposited on the substrate; a heater having a ring shape is formed on the silicon oxide layer to surround the nozzle; a MOS integrated circuit is mounted on the substrate to drive the heater and includes a MOSFET and electrodes connected to the heater. The silicon oxide layer, the heater, and the MOS integrated circuit are formed monolithically on the substrate. Additionally, a DLC coating layer having a high hydrophobic property and high durability is formed on an external surface of the printhead.

Method for manufacturing a monolithic ink-jet printhead

An ink-jet print head and a method of making the same comprising the steps of sequentially laminating a heating layer and an electric conductive layer on a substrate, patterning the electric conductive layer to expose a predetermined area of the top surface of the heating layer, forming a protective layer on the top surfaces of the electric conductive layer and exposed heating layer, and laminating an ink chamber barrier and a nozzle plate on the top surface of the protective layer, thereby forming an ink chamber. The protective layer is provided by forming a cavitation layer by alternately laminating at least two types of thin film layers of different materials over the exposed heating layer and the electric conductive layer to resist fractures and oxidization resulting from use.

Protective layer of ink-jet print head and method of making ink-jet print head having the same

An ink-jet printhead and a manufacturing method thereof include a substrate on which an ink chamber having a predetermined volume is formed, a passage for supplying ink to the ink chamber which is formed on a bottom of the ink chamber, a nozzle plate which includes a nozzle corresponding to a center of the ink chamber and at least two insulating layers formed on the substrate, a bubble guide formed inside the nozzle plate and extending from the nozzle into the ink chamber, and a heater which surrounds the nozzle and is disposed between the two insulating layers. A hydrophobic coating layer is formed on a surface of a uppermost layer of the nozzle plate, and a droplet ejecting portion that has a diameter smaller than that of the nozzle of the nozzle plate and is disposed on the same axis as the nozzle, is formed in the hydrophobic coating layer. The nozzle plate is prevented from becoming wet due to ink, stability of an ink spray and a consecutive spray performance are improved, and thus a printing quality and a printing performance of the ink-jet printhead are generally improved.

Growing community of inventors

Gyeonggi-do, South Korea

Jae-sik Min