Samsung Display Co., Ltd.

Jae-Seung Yoo

Alexander Voronov

Gyoo-Wan Han

Kyung-Hoe Heo

Suk-Ho Lee

A method for inspecting a polysilicon layer includes: radiating excitation light to the polysilicon layer; and detecting a photoluminescence signal generated by the excitation light, wherein average power of the excitation light has a range of 1 W/cmto 10 W/cm, and peak power of the excitation light has a range of 100 W/cmto 1000 W/cm.

Method for inspecting polysilicon layer

A device for inspecting a polycrystalline silicon layer that is crystallized by receiving irradiated laser beams on a front side of the polycrystalline silicon layer includes: a light source configured to emit inspection beams to a rear side of the polycrystalline silicon layer; a light inspector configured to inspect the inspection beams reflected at the rear side of the polycrystalline silicon layer; and a controller that controls the light source and the light inspector.

Growing community of inventors

Yongin, South Korea

Jae-Seung Yoo