Samsung Electronics Co., Ltd.

Korea Photonics Technology Institute

Jae Pil Kim

Wan Ho Kim

Young Gu Jin

Dong Ki Min

Tae Yon Lee

Seong Deok Hwang

Dong Seok Suh

Sang Bin Song

Dong Hyuck Kam

Yong Joon Cheong

Sie Wook Jeon

A method includes providing packets to demodulate a modulated photon signal output from a light source, wherein each packet includes a first interval and a second interval, and providing oscillation signals respectively having different phases from one another to photogates during the first interval of each of the packets. The light source is disabled and a direct current (DC) voltage is provided to the photogates during the second interval of each of the packets.

Sensor, method of operating the same, and system including the same

There is provided a light emitting apparatus including: at least one pair of lead frames; a light emitting device electrically connected to the lead frames to emit ultraviolet rays; a body including a side wall surrounding the light emitting device, and a groove portion formed in an upper surface of the side wall to receive an adhesive; and a lens part disposed above the light emitting device and fixed to the upper surface of the side wall of the body by the adhesive.

Light emitting apparatus

A wafer handling apparatus prevents polymers from sticking to the handler which conveys a wafer into/from a process chamber in which the wafer is treated. The wafer handler has an arm which is rotatably driven and an effector integral with the arm. The wafer is supported on the effector via a vacuum chuck formed by vacuum holes in the effector. The temperature of the handler is controlled to be identical to that inside the process chamber. The temperature controlling system has an electric heater for heating the effector and a current supplying apparatus which intermittently supplies current to the heater to maintain the temperature of the effector. Because the temperature of the handler is maintained at least as high as that inside the process chamber, polymers floating in the process chamber are prevented from sticking to the handler.

Wafer handling apparatus for transferring a wafer to and from a process chamber

Growing community of inventors

Gwangju, South Korea

Jae Pil Kim