Korea Institute of Machinery & Materials

Jae Ok Lee

Min Goo Hur

Seock Joon Kim

Young Hoon Song

Woo Seok Kang

Min Suk Cha

Kwan Tae Kim

Dae Hoon Lee

Kwan-Tea Kim

Dae-Woon Lee

A plasma reactor for abating hazardous materials included in process gases while being installed on an exhaust path of the process gases toward a vacuum pump is provided. The plasma reactor includes an insulator having a pipe shape through which process gases pass, a first ground electrode connected to a front end of the insulator facing the process chamber, a second ground electrode connected to a rear end of the insulator and provided with a facing part that faces a center of the inside of the insulator along the moving direction of process gases, and a driving electrode fixed to an external circumferential surface of the insulator and connected to a power supply applying an AC or RF voltage.

Plasma reactor for abatement of hazardous material

A plasma reactor for abating hazardous materials by decomposing various hazardous materials in a front end part of a vacuum pump is provided. A plasma reactor for abating hazardous materials includes a ground electrode part, an insulator, and a driving electrode. The ground electrode part includes a first ground electrode located in a front end part of the vacuum pump and having a tubular shape, including a first end part facing the vacuum pump and a second end part at an opposite side thereof, and a second ground electrode connected to a side of the first ground electrode and having a tubular shape and transferring the process gas. The insulator is connectedly installed to the second end part. The driving electrode is fixed to an outer surface of the insulator, a driving voltage is applied while being connected to a power supply, and low pressure plasma is generated inside of the first ground electrode due to a voltage difference from the ground electrode part.

Plasma reactor for abating hazardous material

The present invention relates to a plasma reaction apparatus and a plasma reaction method using the same. More particularly, the present invention relates to a plasma reaction apparatus which is applied to the reforming of fuel by generating rotating arc plasma and using the rotating arc being generated, the chemical treatment of a persistent gas, and the apparatus for decreasing NOx by an occlusion catalyst, and a plasma reaction method using the same. For this purpose, a raw material for a reaction is allowed to flow through an inflow hole in a swirl structure so that the raw material forms a rotating flow to progress. Accordingly, the raw material is sufficiently reacted in a plasma reaction space of a restrictive volume, and a high temperature plasma reaction is more promptly performed. Furthermore, a plasma reaction zone is expanded, prior to discharge, by a broad area chamber formed as the width of an upper part of a furnace is expanded, and plasma being generated is expanded and stayed as a pointed end spaced from an electrode at a predetermined interval is formed at an expanded end. Accordingly, the present invention relates to a plasma reaction apparatus and a plasma reaction method using the same, a plasma reaction method of a persistent gas, and an apparatus decreasing NOx by an occlusion catalyst, all of which are capable of excluding the discontinuity of the plasma reaction zone.

Plasma reaction apparatus, plasma reaction method using the same, plasma reaction method of persistent gas, and apparatus for decreasing NOx by occlusion catalyst

A plasma reaction apparatus and method applied to reformation of fuel by generating and using rotating arc plasma in a furnace, the chemical treatment of a persistent gas, and the apparatus for decreasing NOx by an occlusion catalyst. A raw material for a reaction is allowed to flow into the furnace through a hole, causing it to flow within the furnace in a continuous swirl. Furthermore, an expanded plasma reaction zone is provided by a wide area chamber which is formed on an upper part of the furnace and has a greater width than that of a lower part of the furnace, and thus a plasma being generated can be expanded by the expanded plasma zone and delayed from flowing out of the furnace by corners of the wide area chamber that is spaced from a plasma inducing electrode therein.

Growing community of inventors

Daejeon, South Korea

Jae Ok Lee