Other

Electronics and Telecommunications Research Institute

Jae-Ki Sim

Moon Youn Jung

Dae-Sik Lee

Kwang-Ho Kwon

Provided is an apparatus for analyzing a bio-material. According to an embodiment of the inventive concept, the apparatus may include a light distribution part having grooves, a reflective layer provided on the grooves, and a light emitting part configured to emit light to the light distribution part. The grooves may be recessed from a top surface of the light distribution part, and sidewalls of the grooves may be inclined with respect to the top surface of the light distribution part. The grooves may include a first groove and a second groove. A distance between the light emitting part and the second groove may be greater than that between the light emitting part and the first groove, and a bottom surface of the second groove may be disposed at a level lower than that of a bottom surface of the first groove.

Apparatus for analyzing bio-material

A device for producing inductively coupled plasma and method thereof, wherein a coil is uniformly and dispersedly arranged on a lateral wall in a chamber, instead of the prior device of a permanent magnet mounted on an external wall of the chamber, and the coil is so disposed as to allow a magnetic field formed from the coil to be mutually reinforced at a central portion of the coil, such that charged particles created inside the chamber are effectively isolated relative to the lateral wall of the chamber, thereby enabling to produce plasmas of high density and high uniformity. Intensity and frequency of power source applied to the coil are adjusted to enable to adjust the density and uniformity of plasmas produced in the chamber according to required process characteristics in etching or depositing process using plasmas such that flexibility is provided to the process using the plasmas and design of new process can be free from restriction calling for process chamber configure. The present invention is simplified in structure thereof because of a permanent magnet being dispensed with, to thereby reduce the manufacturing cost greatly.

Growing community of inventors

Daejeon, South Korea

Jae-Ki Sim