Korea Institute of Machinery & Materials

Jae-Jong Lee

Kee-Bong Choi

Hyung-jun Lim

Gee-Hong Kim

Geehong Kim

Hyungjun Lim

Junhyoung Ahn

Soongeun Kwon

In a leveling unit for imprinting and an imprint apparatus having the leveling unit, the leveling unit includes a base plate, a moving plate and a plurality of link parts. The moving plate is spaced apart from the base plate, and has a reference plane heading for an opposite direction of the base plate. The plurality of link parts connects the base plate with the moving plate, is spaced apart from each other by a predetermined distance along a circumferential direction with respect to a center of the reference plane, and is elastically and independently transformed by a pressing force applied to the reference plane to adjust an inclination of the moving plate.

Leveling unit for imprinting and imprint apparatus comprising same

In an apparatus and a method for liquid transfer imprint lithography, the apparatus includes a roll unit, a plane unit and a control unit. The roll unit includes a roll stamp, a horizontal moving stage, a roll angular compensating stage and a roll rotating part. The plane unit is disposed under the roll unit and includes a first substrate, a first fixing chuck, a first substrate driving part, a second substrate, a second fixing chuck and a second substrate driving part. The control unit controls an operation of the roll unit and the plane unit.

Apparatus and method for liquid transfer imprint lithography using a roll stamp

A self-alignment stage for compression-forming machines, which self-aligns an upper surface of a lower mold seated on an inner frame, thus compensating for a relative pose error of the lower mold with respect to an upper mold when the material is compression-formed between the upper mold and the lower mold. The self-alignment stage for the compression-forming machines, includes an outer frame comprising a body having a space therein, a plurality of outer connectors protruding from a side surface of the body of the outer frame so as to support the body on a support base of a compression-forming machine, and the inner frame placed in the space of the outer frame such that the inner frame executes a horizontal translational motion and a rotational motion with respect to the outer frame. The self-alignment stage further includes a plurality of inner connectors to connect the inner frame to the outer frame while allowing the inner frame to execute the horizontal translational motion and the rotational motion with respect to the outer frame. The lower mold is seated on the inner frame is self-aligned by elasticity of the inner and outer connectors, so that the upper surface of the lower mold is in parallel surface contact with a lower surface of the upper mold when the material is compression-formed by the upper mold.

Self-alignment stage for compression-forming machines

Growing community of inventors

Daejeon, South Korea

Jae-Jong Lee