Samsung Electronics Co., Ltd.

Korea Institute of Science and Technology

Jae Hyung Ahn

Sung Ho Jang

Youngsoon Um

Souk Kim

Yu Sin Yang

Sung Yoon Ryu

Joon Seo Song

Kang Woong Ko

Young Hoon Sohn

Kyoung Hwan Lee

Gil Woo Song

Chul Hyung Yoo

Yong Ju Jeon

Hyoung Jo Jeon

Byoung-In Sang

Hyo Hyeong Kang

A semiconductor pattern detecting apparatus is provided. The semiconductor pattern detecting apparatus includes a stage configured to position a wafer formed with a semiconductor pattern, the stage extending in a first direction and a second direction perpendicular to the first direction, an electron emitter configured to irradiate first electrons on the semiconductor pattern, an electrode configured to generate an electric field to induce an electric potential on a surface of the semiconductor pattern, a detector configured to detect second electrons emitted from the semiconductor pattern, an imager configured to obtain a plurality of first images by using the second electrons detected by the detector, and at least one controller configured to apply a first voltage and a second voltage different from the first voltage to the electrode alternately and repeatedly and to generate a second image by combining the plurality of first images, wherein the imager is so configured that each of the plurality of first images are obtained when the first voltage is applied to the electrode.

Semiconductor pattern detecting apparatus

A method for measuring a semiconductor device is provided. A method for measuring a semiconductor device includes defining an interest area and an acceptable area in a chip area on a wafer; performing a first measurement of the chip area with a spectral imaging device to acquire spectrum data of the chip area; assuming the distribution of the spectrum data of a first pixel in the acceptable area is a normal distribution; calculating a distance from a central point on the normal distribution to second pixels in the interest area; selecting a position of a second pixel having a distance from the central point on the normal distribution greater than a predetermined range, among the second pixels, as a candidate position; and performing a second measurement of the candidate position.

Method for measuring semiconductor device

Provided is a method for producing alcohol or hydrogen gas comprising culturing alcohol-producing microorganisms in a waste fermented solution generated from the bioethanol production process. Glycerol included in the waste fermented solution generated from the bioethanol production process is converted by the microorganisms to butanol under an anaerobic condition. Since the waste fermented solution generated from the bioethanol production process can be utilized as a source of a biofuel, environmental and energy problems can be solved at once.

Method for producing alcohol using bioethanol waste fermented solution

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Seoul, South Korea

Jae Hyung Ahn