Samsung Electronics Co., Ltd.

Jae-Hyun Yang

Yo-Han Ahn

Hyun-Joon Kim

Jung-sung Hwang

Mi-Ae Kim

Kun-Hyung Lee

Tae-Jin Hwang

Gui-Young Cho

Hong-Hee Jeong

In an embodiment, heat treatment equipment comprises a process tube, an exhaust duct connected to the process tube, and, during operation, exhausting gases present within the process tube. The heat treatment equipment also comprises a hollow pressure control member interposed between the process tube and the exhaust duct, the pressure control member being operatively connected to the process tube and the exhaust duct respectively, and including one or a number of openings. Negative pressure is avoided in the process tube during heat treatment processes so that unwanted gas and impurities cannot enter the process tube from outside.

Heat treatment equipment

An air-conditioning system of a substrate processing apparatus includes an air inlet line for providing air to a clean room. A contamination control apparatus for removing contaminants in the air is connected to the air inlet line. A controller controls temperature and humidity of the air without the contaminants. An air outlet line provides the air having the controlled temperature and humidity to a substrate processing chamber that is disposed in the clean room. The contamination control apparatus includes a spray unit having at least one nozzle that sprays water. At least one eliminator that traps the water for capturing contaminants in the air and drops the trapped water into a tank. A water circulation unit provides the water that includes an additive for controlling pH of the water to the spray unit.

Contamination control system and air-conditioning system of a substrate processing apparatus using the same

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Gyeonggi-do, South Korea

Jae-Hyun Yang