Electronics and Telecommunications Research Institute

Jae Hyun Moon

Hye Yong Chu

Yong Hae Kim

Yoon Ho Song

Seong Hyun Kim

Tae Hyoung Zyung

Su Jae Lee

Jin A Park

Choong Heui Chung

Provided are an environmental gas sensor and a method of manufacturing the same. The environmental gas sensor includes an insulating substrate, metal electrodes formed on the insulating substrate, and a sensing layer in which different kinds of nanofibers are arranged perpendicular to each other on the metal electrodes. Thus, the environmental gas sensor can simultaneously sense two kinds of gases.

Environmental gas sensor and method of manufacturing the same

Provided are a method of fabricating a multilayered thin film transistor using a plastic substrate and an active matrix display device including the thin film transistor fabricated by the method. The method includes: preparing a substrate formed of plastic; forming a buffer insulating layer on the plastic substrate; forming a silicon layer on the buffer insulating layer; patterning the silicon layer to form an active layer; forming a gate insulating layer on the active layer; stacking a plurality of gate metal layers on the gate insulating layer; patterning the plurality of gate metal layers; and etching a corner region of the lowest gate metal layer formed on the gate insulating layer of the patterned gate metal layers. Accordingly, a gate metal is formed which includes a multilayered gate metal layer and has an etched corner region, thereby reducing an electric field of the corner to reduce a leakage current of the TFT.

Method of fabricating thin film transistor having multilayer structure and active matrix display device including the thin film transistor

Growing community of inventors

Daejeon, South Korea

Jae Hyun Moon