Skhynix Inc.

Jae Hyun Han

Hyangkeun Yoo

Se Ho Lee

Jae Gil Lee

Won Tae Koo

Dong Ik Suh

A method of manufacturing a semiconductor device comprises: providing a substrate having a base insulation layer; forming, over the base insulation layer, a plurality of first word line structures extending in a first lateral direction and a first switching functional layer disposed between the plurality of first word line structures, the plurality of first word line structures; forming a first interlayer insulation layer on the plurality of first word line structures and the first switching functional layer; forming a plurality of second word line structures and a second switching functional layer disposed between the plurality of second word line structures; performing selective etching to the second switching functional layer, the first interlayer insulation layer, the first switching functional layer, and the base insulation layer to form bit line contact holes; and providing a conductive material in the bit line contact holes to form bit line structures.

Method of manufacturing a semiconductor device having three-dimensional cell structure

A method of manufacturing a semiconductor device comprises: forming a first array including a first bit line extending in a first direction, a first word line extending in a second direction intersecting the first direction, and a first transistor being located at a first intersection of the first word line and the first bit line, the first transistor being connected to the first word line and the first bit line; forming a first capacitor electrically connected to the first transistor, the first capacitor being located at a first part of the first intersection; and forming a second capacitor located at a second part of the first intersection.

Semiconductor device and manufacturing method of semiconductor device

A ferroelectric component includes a first electrode, a tunnel barrier layer disposed on the first electrode to include a ferroelectric material, a tunneling control layer disposed on the tunnel barrier layer to control a tunneling width of electric charges passing through the tunnel barrier layer, and a second electrode disposed on the tunneling control layer.

Ferroelectric components and cross point array devices including the ferroelectric components

A semiconductor device may include: a first conductive layer; a second conductive layer spaced apart from the first conductive layer; a tunnel insulating layer interposed between the first conductive layer and the second conductive layer and disposed adjacent to the first conductive layer; a charge blocking layer interposed between the first conductive layer and the second conductive layer and disposed adjacent to the second conductive layer; and a selector layer interposed between the tunnel insulating layer and the charge blocking layer, wherein the semiconductor device functions as a self-selecting memory.

Semiconductor device including selector layer

A semiconductor device includes a first conductive layer including a first metal, a second conductive layer electrically connected to the first conductive layer and including a second metal, and an interconnection structure common to a connection portion of the first and second conductive layers. The interconnection structure may include a seed layer on the first conductive layer that includes graphene, and a metal migration barrier layer on the seed layer that includes MXene.

Semiconductor device including interconnection structure including MXene and method of manufacturing the same

An electronic device includes a base element, a source electrode layer and a drain electrode layer disposed to be spaced apart from each other on the base element, a channel layer disposed between the source electrode layer and the drain electrode layer on the base element that accommodates metal ions, a metal ion conduction layer disposed on the channel layer, and a gate electrode layer disposed on the metal ion conduction layer. The channel layer includes a plurality of unit films and channel spaces between the plurality of unit films. The plurality of unit films are arranged to be parallel to a direction substantially perpendicular to a surface of the base element.

Electronic device including channel layer including variable resistance and method of manufacturing the same

An electronic device includes a substrate, a source electrode layer and a drain electrode layer that are disposed to be spaced apart from each other over the substrate, a channel layer that is capable of receiving hydrogen, disposed between the source electrode layer and the drain electrode layer over the substrate, a proton conductive layer disposed on the channel layer, a hydrogen source layer disposed on the proton conductive layer, and a gate electrode layer disposed on the hydrogen source layer.

Electronic device including proton conductive layer and resistance change channel layer capable of receiving hydrogen

A nonvolatile memory device includes a substrate having an upper surface, and a gate structure disposed over the substrate. The gate structure includes at least one gate electrode layer pattern and at least one gate insulation layer pattern, which are alternately stacked along a first direction perpendicular to the upper surface. The gate structure extends in a second direction perpendicular to the first direction. The nonvolatile memory device includes a ferroelectric layer disposed on at least a portion of one sidewall surface of the gate structure. The one sidewall surface of the gate structure forms a plane substantially parallel to the first and second directions. The nonvolatile memory device includes a channel layer disposed on the ferroelectric layer, and a source electrode structure and a drain electrode structure disposed to contact the channel layer and spaced apart from each other in the second direction.

Nonvolatile memory device having a ferroelectric layer

A nonvolatile memory device according to an embodiment includes a substrate, a resistance change layer disposed on the substrate, a gate electrode layers disposed on the resistance change layer, and a first electrode pattern layer and a second electrode pattern layer that are disposed in the substrate and contact different portions of the resistance change layer. The resistance change layer includes movable oxygen vacancies or movable metal ions.

Nonvolatile memory device having resistance change layer

A semiconductor device according to an embodiment of the present disclosure includes a substrate, a gate structure disposed over the substrate, a dielectric structure disposed to contact a sidewall surface of the gate structure over the substrate, and a channel layer disposed on a sidewall surface of the dielectric structure over the substrate. The gate structure includes a gate electrode layer and an interlayer insulation structure which are alternately stacked. The interlayer insulation structure includes a metal-organic framework layer.

Semiconductor device including interlayer insulation structure including metal-organic framework

A semiconductor device includes a substrate, a first bit line disposed on the substrate, a first tunnel insulation layer disposed on the first bit line, a variable resistance structure disposed on the first tunnel insulation layer and having a pillar structure, a second tunnel insulation layer disposed on an upper surface of the variable resistance structure, a second bit line disposed on the second tunnel insulation layer, a barrier insulation layer disposed on a sidewall surface of the variable resistance structure, and a word line disposed on the barrier insulation layer. A dielectric constant of the barrier insulation layer is greater than a dielectric constant of each of the first and second tunnel insulation layers.

Three-dimensional semiconductor device having variable resistance structure

A semiconductor device includes a substrate, a bit line conductive layer disposed on the substrate and extending in a first lateral direction substantially parallel to a surface of the substrate, first and second channel structures disposed on the bit line conductive layer to be spaced apart from each other in the first lateral direction, first and second gate dielectric layers disposed on side surfaces of the first and second channel structures over the substrate, first and second gate line conductive layers disposed on the first and second gate dielectric layers, respectively, the first and second gate line conductive layers common to the first and second channel structures, respectively, and extending in a second lateral direction perpendicular to the first lateral direction and substantially parallel to the surface of the substrate, and first and second storage node electrode layers disposed over the first and second channel structures, respectively.

Semiconductor device having transistor device of three-dimensional structure

A semiconductor device includes a substrate and a gate structure disposed over the substrate. The gate structure includes gate electrode layers and interlayer insulation structures that are alternately stacked with each other. The semiconductor device includes a dielectric structure disposed over the substrate to contact a sidewall surface of the gate structure, and a channel layer disposed on a sidewall surface of the dielectric structure over the substrate. Each of the interlayer insulation structure includes an insulation layer and a metal-organic framework layer that are disposed on the same plane.

Semiconductor device with interlayer insulation structure including metal-organic framework layer and method of manufacturing the same

A resistive memory device includes: conductive layers and interlayer insulating layers, which are alternatively stacked; a vertical hole vertically penetrating the conductive layers and the interlayer insulating layers; a gate insulating layer disposed over an inner wall of the vertical hole; a charge trap layer disposed over an inner wall of the gate insulating layer; a channel layer disposed over an inner wall of the charge trap layer; and a variable resistance layer disposed over an inner wall of the channel layer.

Resistive memory device and operating method of the resistive memory device

A semiconductor memory device includes a tunnel insulating layer, a data storage layer, and a blocking insulating layer that are sequentially disposed. The tunnel insulating layer includes Metal Organic Frameworks (MOF) having a lower dielectric constant than a dielectric constant of the blocking insulating layer.

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Icheon-si, South Korea

Jae Hyun Han