Samsung Electronics Co., Ltd.

Hyundai Motor Company

Jae-Hun Jeong

Soon-Moon Jung

Han-Soo Kim

Jae-Hoon Jang

Won-Seok Cho

Sun-Il Shim

Hoo-Sung Cho

Jae-hoon Jang

Ki-Hyun Kim

Hoon Lim

Jun-Beom Park

Sung-Min Hwang

Ki-Nam Kim

Jong-Hyuk Kim

Won-seok Cho

Jong-In Yun

Han-soo Kim

Jin-Ho Kim

Kyu-Chan Lee

Seong-Hyun Kim

Jin-Soo Lim

Young-Chul Jang

Ju-Young Lim

Kun-Ho Kwak

Young-seop Rah

Chang-Min Hong

Jong-Dae Kim

Hae-sung Oh

Mi-So Hwang

Dew-ill Chung

Sang-Hyun Jang

Chang-Jin Park

Jae-Gun No

I-Saac Lee

Hyung-Ok Choi

A vertical non-volatile memory device includes a substrate, and a first stack of word lines and a second stack of word lines extending in a first direction on the substrate and separated from each other in a second direction perpendicular to the first direction. The device further includes first array lines extending in the second direction on the first and the second stack, and connected to word lines of the first and the second stack through at least two of first via contacts in a same level. The device further include first word select lines being in a same level and extending in the first direction, and connected to each of the first array lines through at least one of second via contacts. Ends of each of the first and the second stack have a form of stairs on the substrate.

Vertical non-volatile memory device and method of fabricating the same

Vertical non-volatile memory device including plural word line stacks

A non-volatile memory device having a vertical structure includes a NAND string having a vertical structure. The NAND string includes a plurality of memory cells, and at least one pair of first selection transistors arranged to be adjacent to a first end of the plurality of memory cells. A plurality of word lines are coupled to the plurality of memory cells of the NAND string. A first selection line is commonly connected to the at least one pair of first selection transistors of the NAND string.

Non-volatile memory device having vertical structure and method of operating the same

A vertical non-volatile memory device is structured/fabricated to include a substrate, groups of memory cell strings each having a plurality of memory transistors distributed vertically so that the memory throughout multiple layers on the substrate, integrated word lines coupled to sets of the memory transistors, respectively, and stacks of word select lines. The memory transistors of each set are those transistors, of one group of the memory cell strings, which are disposed in the same layer above the substrate. The word select lines are respectively connected to the integrated word lines.

One embodiment exemplarily described herein can be generally characterized as a semiconductor device that includes a lower level device layer located over a semiconductor substrate, an interlayer insulating film located over the lower level device layer and an upper level device layer located over the interlayer insulating film. The lower level device layer may include a plurality of devices formed in the substrate. The upper level device layer may include a plurality of semiconductor patterns and at least one device formed in each of the plurality of semiconductor patterns. The plurality of semiconductor patterns may be electrically isolated from each other. Each of the plurality of semiconductor patterns may include at least one active portion and at least one body contact portion electrically connected to the at least one active portion.

Semiconductor device having driving transistors

A stack-type semiconductor device and a method of manufacturing the same are provided. The stack-type semiconductor device includes an insulation layer on a single-crystalline substrate, a contact plug penetrating the insulation layer to contact the single-crystalline substrate, an upper semiconductor pattern including an impurity region and a gate structure positioned between the impurity regions on the upper semiconductor pattern. An upper surface of the contact plug contacts a lower surface of the semiconductor pattern. An operation failure of the stack-type semiconductor device is reduced since the upper semiconductor pattern is electrically connected to the single-crystalline semiconductor substrate.

Stack-type semiconductor device

A one transistor DRAM device includes: a substrate with an insulating layer, a first semiconductor layer provided on the insulating layer and including a first source region and a first region which are in contact with the insulating layer and a first floating body between the first source region and the first drain region, a first gate pattern to cover the first floating body, a first interlayer dielectric to cover the first gate pattern, a second semiconductor layer provided on the first interlayer dielectric and including a second source region and a second drain region which are in contact with the first interlayer dielectric and a second floating body between the second source region and the second drain region, and a second gate pattern to cover the second floating body.

Methods of forming one transistor DRAM devices

A method of fabricating a non-volatile memory device according to an example embodiment may include etching a plurality of sacrificial films and insulation films to form a plurality of first openings that expose a plurality of first portions of a semiconductor substrate. A plurality of channel layers may be formed in the plurality of first openings so as to coat the plurality of first portions of the semiconductor substrate and side surfaces of the plurality of first openings. A plurality of insulation pillars may be formed on the plurality of channel layers so as to fill the plurality of first openings. The plurality of sacrificial films and insulation films may be further etched to form a plurality of second openings that expose a plurality of second portions of the semiconductor substrate. A plurality of side openings may be formed by removing the plurality of sacrificial films. A plurality of gate dielectric films may be formed on surfaces of the plurality of side openings. A plurality of gate electrodes may be formed on the plurality of gate dielectric films so as to fill the plurality of side openings.

Method of fabricating non-volatile memory device having vertical structure

A semiconductor device includes a body region having a source region, a drain region, a channel region interposed between the source region and the drain region, and a body region extension extending from an end of the channel region. A gate pattern is formed on the channel region and the body region, and a body contact connects the gate pattern to the body region. A sidewall of the body region extension is self-aligned to a sidewall of the gate pattern. Methods of forming semiconductor devices having a self-aligned body and a body contact are also disclosed.

Methods of forming semiconductor devices having self-aligned bodies

Provided is a non-volatile memory device including first and second, vertically stacked semiconductor substrates, a plurality of non-volatile memory cell transistors formed in a row on the first and second semiconductor substrates, and a plurality of word lines connected to gates of the plurality of non-volatile memory cell transistors. The plurality of non-volatile memory cell transistors are grouped into two or more memory cell blocks, such that a first voltage is applied to the first semiconductor substrate including a first memory cell block to be erased, and either (1) a second voltage less than the first voltage and greater than 0V is applied to the second semiconductor substrate not including the first memory cell block, or (2) the second semiconductor substrate not including the first memory cell block is allowed to electrically float.

Non-volatile memory device and erase method

A non-volatile memory device includes first and second strings memory cell transistors, related first and second word lines respectively connected to gates of the first string memory cell transistors, wherein respective first and second word lines are connected to commonly receive a bias voltage. The non-volatile memory device also includes dummy cell transistors connected to the first and second strings, and first and second dummy word lines configured to receive different bias voltages.

Non-volatile memory device and method of operating the same

A driving method of a three-dimensional memory device having a plurality of layers is provided. One of the layers is selected. A well of the selected layer is biased with a first well voltage. A word line voltage is applied to a selected word line of the selected layer. A well of an unselected layer is biased with a second well voltage higher than the first well voltage.

Three-dimensional memory device and driving method thereof

Growing community of inventors

Gyeonggi-do, South Korea

Jae-Hun Jeong