Samsung Electronics Co., Ltd.

Other

Jae-Chul Hwang

Sun-Ho Kim

Sung-Jin Kim

Jinwook Kim

Seok Heo

Sung-Wook Jung

Ki-Hoon Nam

Yonghun Lee

Kang-Min Park

Jung-Jun Park

Han-Sang Cho

Chongwoo Park

Gyu-Chan Jeoung

Jongwon Kim

Byeong-sang Kim

Shin-Sang Lee

Tae-Min Earmme

Wok-Kwan Bae

Jin-Uk Park

Jong-Geug Kim

Cornel Iurascu

Gyu-Young Lee

Seon-joong Liu

Changbum Park

Kyu-Chul Shim

Kiha Lee

Ji-Hoon Yeo

An apparatus for attaching a pad on or to an edge ring includes a chamber defining a space for attaching a pad on or to an edge ring, a pad support within the chamber and supporting the pad thereon, an edge ring support within the chamber and facing the pad support, the edge ring support securing the edge ring thereon, a driving system connected to at least one of the pad support and the edge ring support and configured to move the edge ring support relative to the pad support, and a vacuum exhaust system configured to create a vacuum atmosphere within the chamber.

Apparatus and method of attaching pad on edge ring

A link structure includes a first link, a second link having an end that is connected to an end of the first link, a third link having an end that is connected to the end of the first link, and provided on a portion of the second link, a first rotary shaft partially provided in the first link, a first actuator configured to rotate the first link about the first rotary shaft; a second rotary shaft partially provided in the second link, the second rotary shaft being different from the first rotary shaft, and a second actuator configured to rotate the second link about the second rotary shaft, the first and second actuators being provided in the first link.

Link structure

An actuator unit, a robot including the same, and a reducing apparatus, the actuator unit including a driving unit; a sensor unit; a control unit; and a frame unit.

Actuator unit, robot including the same, and reducing apparatus

A six-degree-of-freedom parallel mechanism is provided for expanding a grade of a spindle. The parallel mechanism has a spindle that turns round a workpiece at a tilting angle of 90.degree. in a workspace, to thereby allow a machining for both vertical and horizontal planes of the workpiece, and a vertical turning process, by a single machining center. A six-axis multi-machining type machining center embodying the parallel mechanism of the present invention is also disclosed. An over-actuated multi-machining type machining center further including over-actuated actuators is presented to solve a problem of driving joints' singularity caused by the parallel mechanism.

Parallel mechanism for multi-machining type machining center

Growing community of inventors

Seoul, South Korea

Jae-Chul Hwang