Samsung Electronics Co., Ltd.

Jae Chol Joo

Tae Joong Kim

Byeong Hwan Jeon

Jun Bum Park

Soo Ryonng Kim

Tae Heung Ahn

A wafer inspection apparatus includes a linear stage configured to support a chuck on which a wafer is disposed and to move the chuck along a guide rail, wherein the guide rail extends in a first direction, an image sensor module overlapping the linear stage, and a rotary stage supported by the linear stage. The rotary stage is configured to rotate the chuck in a state where a center of the wafer is aligned with the image sensor module. The image sensor module includes a light source directing light onto the wafer, and an image sensor extending in a second direction crossing the first direction.

Growing community of inventors

Suwon-si, South Korea

Jae Chol Joo