Entegris, Inc.

Jad Ali Jaber

Saksatha Ly

James Hamzik

Justin Brewster

Vinay Goel

Alketa Gjoka

Maybelle Woo

Nicholas J Filipancic

Jeffrey E Townley

Testu Kohyama

Kwok-Shun Cheng

Wai Ming Choi

Vinay Kalyani

Anthony Dennis

Siddarth Sampath

Aabid A Mir

This disclosure provides certain strong cation-modified ion exchange resins and membranes useful for carrying out the removal of metal and metal ion contaminants in fluid compositions. Filtered liquid compositions with significantly reduced amounts of metals can be used in a microelectronic manufacturing process, such as liquids for removing photoresist. The cation-modified ion exchange resins and membranes of the disclosure can be configured for use in a microelectronic manufacturing system, which can be utilized in the system as a point of use metal-removal feature for liquids entering the system. Advantageously, the filter materials and methods of this disclosure showed considerable improvement in preventing degradation and the formation of color bodies and dimeric and oligomeric materials from ketones (e.g., cyclohexanone) in the liquid compositions while not compromising the filter material's ability to remove undesired metal ions.

Membranes for acid-sensitive solvents

Described are methods of membrane distillation for processing organic liquids, hydrophobic distillation membranes useful for membrane distillation methods, and methods of preparing the hydrophobic distillation membranes.

Hydrophobic membranes and membrane distillation methods

Described are ion-exchange membranes that include a porous polymeric membrane and imidazole ion-exchange groups at surfaces of the membrane; ion-exchange membranes and filters that contain the ion-exchange membranes; and methods of using the ion-exchange membranes and filters for separating charged biological molecule from a liquid.

Ion-exchange membranes, filters, and methods

The disclosure is directed to removal of metal contaminants from fluids, as well as ligand-modified filter materials useful for carrying out such methods. The filters and methods of this disclosure are particularly effective for removal of metals from liquid compositions comprising amines. Such liquid compositions with significantly reduced amounts of metals can be used in a microelectronic manufacturing process, such as liquids for removing photoresist or liquids used in etching. The ligand-modified filters, such as ligand-modified porous membranes, can be configured for use in a microelectronic manufacturing system, which can be utilized in the system as a point of use metal-removal feature for liquids entering the system.

Membranes for removing metallic species from amines

Described are filter materials having polycarboxyl ligands, such as iminodiacetic acid, which are highly effective for filtering metals or metal ions from fluids. The filter materials can be particularly useful to filter various fluid compositions, such as those used for wet etching, removing photoresist, and cleaning steps in microelectronic device manufacturing.

Ligand-modified filter and methods for reducing metals from liquid compositions

The present disclosure provides a porous polymeric membrane that is coated with a cross-linked polymerized monomer. The coating on the porous polymeric membrane has a charge when it is immersed in an organic liquid. The coated porous polymeric membrane, a filter utilizing the membrane, and a method for treating an organic liquid used for photoresist with the coated porous polymeric membrane to remove metal contaminants from the organic liquid are disclosed.

Coated porous polymeric membranes

A polysulfone membrane is modified so that monomers are wafted onto the surface of the membrane. The polysulfone membranes can be grafted by contacting the membrane with a grafting solution and exposing the membrane to electromagnetic radiation, typically within the ultraviolet portion of the spectrum. The monomers that are grafted are typically anionic or cationic. The grafted membranes can be used for filtering impurities, such as positively and negatively charged particles, from a liquid. Anionic membranes provide improved filtration of negatively charged impurities, while cationic membranes provide improved filtration of positively charged impurities.

Grafted polysulfone membranes

Described are filter materials including a polyol ligand, such as n-methylglucamine, and/or a polyphosphonic acid ligand, which are highly effective for filtering metals or metal ions from fluids. The filter materials can be particularly useful to filter basic and acidic fluid compositions, such as those used for wet etching, removing photoresist, and cleaning steps in microelectronic device manufacturing.

Described are filter membranes coated with a polyamide, filters and filter cartridges that include the filter membranes, and methods of using and making the filter membranes.

Polyamide coated filter membrane, filters, and methods

A polysulfone membrane is modified so that monomers are grafted onto the surface of the membrane. The polysulfone membranes can be grafted by contacting the membrane with a grafting solution and exposing the membrane to electromagnetic radiation, typically within the ultraviolet portion of the spectrum. The monomers that are grafted are typically anionic or cationic. The grafted membranes can be used for filtering impurities, such as positively and negatively charged particles, from a liquid. Anionic membranes provide improved filtration of negatively charged impurities, while cationic membranes provide improved filtration of positively charged impurities.

Described is a polyethylene membrane and in particular an ultra-high molecular weight polyethylene member that provides a high air permeability and is hydrophobic. The membranes have small pores and are suitable for sterilization by exposure to gamma radiation. The membranes can be made by methods that involve one or more of stretching the membrane and grafting hydrophobic monomers onto the membrane surface. A perfluorinated monomer, such as perfluoro-n-octyl acrylate, can be grafted to one or more surfaces of the membrane. The membrane have a high flow rate compared to unstretched or ungrafted membranes.

Hydrophobic polyethylene membrane for use in venting, degassing, and membrane distillation processes

Grafted, asymmetric, porous, ultra high molecular weight polyethylene membranes having a bubble point between about 5.38 bar (78 psi) and 11.03 bar (160 psi) are disclosed. Monomers are grafted to the porous polymeric membrane surfaces, the monomers having one or more of neutral groups or ion exchange groups grafted to one or more surfaces of the membrane. A combination of two photoinitiators can be used to graft the monomers to the asymmetric, porous, ultra high molecular weight membrane resulting in grafted microporous membranes that have water flow rates that are at least 50% of the water flow rate of an ungrafted, asymmetric, porous ultra high molecular weight polyethylene membrane. The grafted membrane also wets in water.

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Westford, MA, United States of America

Jad Ali Jaber